CN103566669A - Bag type dust collector for producing silicon tetrachloride by direct method - Google Patents

Bag type dust collector for producing silicon tetrachloride by direct method Download PDF

Info

Publication number
CN103566669A
CN103566669A CN201310547336.5A CN201310547336A CN103566669A CN 103566669 A CN103566669 A CN 103566669A CN 201310547336 A CN201310547336 A CN 201310547336A CN 103566669 A CN103566669 A CN 103566669A
Authority
CN
China
Prior art keywords
silicon tetrachloride
outlet
dust
cloth bag
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310547336.5A
Other languages
Chinese (zh)
Inventor
方卫民
谭军
刘国晶
汪建阳
邱贤辉
刘成国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZHEJIANG FUSHITE GROUP CO Ltd
Original Assignee
ZHEJIANG FUSHITE GROUP CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZHEJIANG FUSHITE GROUP CO Ltd filed Critical ZHEJIANG FUSHITE GROUP CO Ltd
Priority to CN201310547336.5A priority Critical patent/CN103566669A/en
Publication of CN103566669A publication Critical patent/CN103566669A/en
Pending legal-status Critical Current

Links

Images

Abstract

The invention relates to a bag type dust collector for producing silicon tetrachloride by a direct method. The bag type dust collector comprises an outer shell body and a plurality of bag devices, wherein a baffle plate is arranged in the outer shell body to divide the outer shell body into a dust collecting chamber and a gas outlet chamber, the bag devices are fixedly arranged on the baffle plate, a gas inlet of the dust collector is arranged above the dust collecting chamber, a dust outlet is arranged at the bottom of the dust collecting chamber, a fine powder recycling tank is arranged below the dust outlet, a gas outlet of the dust collector is arranged on the side wall of the gas outlet chamber, a heating jacket is arranged on the outer side wall of the dust collecting chamber, and a plurality of bag devices are all made of high-temperature resistant materials. According to the bag type dust collector, a small quantity of fine silicon powder in the gas crude product is recycled through the bag type dust collector, therefore, most of silicon powder in the silicon tetrachloride crude product gas is removed, and the dust collection operation in the following process is avoided.

Description

A kind of direct method is produced the fiber bag precipitator of silicon tetrachloride
Technical field
The invention belongs to organic silicon monomer synthesis technical field, relate in particular to the fiber bag precipitator that a kind of direct method is produced silicon tetrachloride.
Background technology
Silicon tetrachloride, molecular formula: SiCl 4, for colourless, be corrosive, non-combustible liquid, have suffocative stink.While being exposed to humid air, form dense smoke, hydrogen chloride is emitted in hydrolysis rapidly.57.6 ℃ of boiling points.Fusing point-70.0 ℃.Can be used for manufacturing organo-silicon compound, as fume colloidal silica, ethyl orthosilicate, organic silicone oil, high-temperature insulation paint, organic siliconresin, silicon rubber and heat resistant pad lining material.High purity silicon tetrachloride is for manufacturing the material of polysilicon, high-purity silicon dioxide and inorganic silicon compound, quartz fibre, and war industry is for the manufacture of screening smoke, and metallurgical industry is for the manufacture of corrosion-resistant ferrosilicon, and foundary industry is used as releasing agent etc.At present, the impact of photovoltaic industry external owing to being subject to " two anti-", almost in the situation of being annihilated, the raw material trichlorosilane device of polysilicon, also almost in full end-of-life state, only has few device to move in carry-deficit, and this has just caused the silicon tetrachloride as by-product of this industry fewer and feweri, silicon tetrachloride becomes tight pin product by the accessory substance of giving it up, price, from freely, increases to more than 4000 yuan/ton, and also can't buy on market.
Publication number be the Chinese patent of CN102712485A disclose a kind of by organic compound combustion generate electricity ash that manufacture technique produces, preferably organic compound combustion is converted to Combustion Energy under the existence of the grey carbonaceous material that the generating equipment of electric power produces to the method for the silicon-containing material chlorination production silicon tetrachloride that by silicon-containing material, preferably contains silicic acid living beings.Publication number is that the Chinese patent of CN102686514A also discloses a kind of granulation body and chlorine, oxygen that utilizes silica and carbonaceous material to form and carries out common chlorination reaction, generate the chlorinating step of silicon tetrachloride, and then silicon tetrachloride is generated to polysilicon with reducing agent metallic reducing.It is a kind of by the mixture of fine and/or unbodied silica, carbon and energy donor being changed to manufacture with chlorine the method for silicon tetrachloride that publication number is that the Chinese patent of CN101472839 also discloses.Energy donor is metallic silicon or silicon alloy, and the interpolation of donor has realized the exothermic reaction of self-supporting on the one hand, has caused on the other hand showing of reacting initial temperature to be reduced.
Patent USP4490344, USP4604272, USP4847059, DE3438444/A1 and EP00077138 are by adding the mode of catalyst, reduce chlorine, silica and carbon reaction and produce the method for the temperature of silicon tetrachloride, main group and the chlorine-containing compound of subgroup, preferably boron chloride and phosphorous oxychloride etc. that the catalyst using is the periodic table of elements the 5th.
Publication number is that the Chinese patent of CN1114559C discloses and a kind ofly by by least having the chlorosilane of a HSi key in silicon, ferro-alloy metal or molecule, reacts under catalyst action with hydrogen chloride, thereby highly selective is produced the method for silicon tetrachloride.The invention provides a kind of catalyst of manufacturing the method for silicon tetrachloride comprises at least one periodic table VIII family's metallic element or its compound and is a kind ofly selected from periodic table VB family's period 3 and under the mixture of the element simple substance in cycle exists subsequently, makes at least to have in silicon metal or molecule chlorosilane and the hcl reaction of a HSi key.USP3754077, USP4130632 disclose a kind of silicon, aluminium alloy and hydrogen chloride or chlorine gas of utilizing and have reacted, and generate the method for trichlorosilane or silicon tetrachloride.USP4980143 has introduced a kind of reaction with silica flour at hydrogen chloride in the process that generates trichlorosilane and silicon tetrachloride mixture, by changing the reaction conditions such as temperature, can improve the content of silicon tetrachloride in mixed chlorosilane.Owing to there are a plurality of chlorosilane components in course of reaction in these, later separation purifying process step is comparatively loaded down with trivial details.
The people such as the Fu Xuehong (research of the synthetic silicon tetrachloride of abandoned catalyst in direct synthesis methylchlorosilane, organosilicon material, 2011, 25(6): 397-401, the 13 Chinese organosilicon seminar collection of thesis in 2006), Yan Shicheng (the research of the synthetic silicon tetrachloride new technology of abandoned catalyst in direct synthesis methylchlorosilane, Northeast Electric Power University's journal, 2010, 30(6): 36-39.) Chinese patent CN1465524A etc. has introduced with (75% the Si of the waste catalyst in methyl chlorosilane monomer production process, 10 ~ 15% Cu) be primary raw material, in the fluidized-bed reactor that is 600mm at diameter, synthesize the method for silicon tetrachloride with chlorine generation gas-solid reaction.
Applicant has applied for Chinese invention patent (number of patent application: 2013103609093, patent application day: 2013-8-19) disclose a kind of process units that utilizes direct method to produce silicon tetrachloride, this device comprises chlorine generating means, silica flour feeding device, fluidized-bed reactor, cyclone separator, fiber bag precipitator, spray column and caustic wash tower, chlorine generating means connects the air inlet of fluidized-bed reactor, silica flour feeding device connects the charge door of fluidized-bed reactor, the skin of fluidized-bed reactor is provided with heating jacket, the gas outlet on fluidized-bed reactor top is connected with heat exchanger, the discharging opening of heat exchanger connects cyclone separator, the discharge gate of cyclone separator bottom refluxes respectively and is connected to described fluidized-bed reactor, the gas outlet on cyclone separator top connects described fiber bag precipitator, the gas outlet on fiber bag precipitator top connects described spray column, the gas outlet on spray column top is connected with condenser, the discharging opening of condenser is connected with silicon tetrachloride crude product storage tank, described silicon tetrachloride crude product storage tank connects described rectifier unit, the gas outlet of described condenser connects described caustic wash tower.
Summary of the invention
The object of this invention is to provide a kind of direct method and produce the fiber bag precipitator of silicon tetrachloride, this fiber bag precipitator can be removed silica flour in silicon tetrachloride crude product gas effectively.
In order to realize above-mentioned object, the present invention has adopted following technical scheme:
A kind of direct method is produced the fiber bag precipitator of silicon tetrachloride, this fiber bag precipitator comprises shell body and a plurality of cloth bag device, in shell body, be provided with dividing plate, dividing plate is divided into dedusting chamber and outlet chamber by shell body, cloth bag device is fixedly installed on dividing plate, the top in dedusting chamber is provided with deduster air inlet, dust outlet is set in the bottom in dedusting chamber, dust outlet below is provided with fine powder recycling can, the sidewall of described outlet chamber is provided with deduster gas outlet, in the dedusting chamber, inner side of described deduster air inlet, is provided with gas block panel; The lateral wall in described dedusting chamber is provided with heating jacket, and described a plurality of cloth bag devices all adopt high temperature resistant material; Described fiber bag precipitator is also connected with cloth bag pulsed dust-removing device and pressure detecting module, cloth bag pulsed dust-removing device comprises compressed air cylinder, a plurality of Venturi tube, pulse control instrument and a plurality of pulse valve, described a plurality of pulse valves are arranged on a plurality of pipelines that are connected to compressed air cylinder and by pulse control instrument, are controlled respectively, a plurality of Venturi tubes connect described a plurality of pipelines, and the gas outlet of a plurality of Venturi tubes is connected respectively to the inside of described cloth bag device.
As preferably, described heating jacket adopts heat-conducting oil heating, on the top of heating jacket, is provided with oil-in, and bottom is provided with oil-out.
As preferably, the top in described dedusting chamber is cylinder, and bottom is cone, at the lateral wall of cone, is provided with access hole.
The present invention is owing to having adopted above-mentioned technical scheme, and the present invention has following feature:
1, in the dedusting chamber, inner side of described deduster air inlet, be provided with gas block panel, avoid gas directly to impact cloth bag device, caused cloth bag device damaged, also played the effect of flow-disturbing simultaneously, can be passing through from each cloth bag device dispersion of gas uniform, improve efficiency;
2, the lateral wall in dedusting chamber is provided with heating jacket, by heating, can avoid in fiber bag precipitator temperature too low, makes silicon tetrachloride crude product gas can condense into liquid and stops up cloth bag device;
3, by cloth bag pulsed dust-removing device and pressure detecting module are set, can in the situation that cloth bag device surface laying dust is too much, make the long-pending dust releasing that is attached to cloth bag device surface, cloth bag device is regenerated;
4, the present invention reclaims by sack cleaner for thinner silica flour a small amount of in gas crude product, like this can most of silica flour of removing silicon tetrachloride crude product gas, avoided carrying out in subsequent technique dedusting.
Accompanying drawing explanation
Fig. 1 is the structural representation of silicon tetrachloride process units of the present invention.
Fig. 2 is the structural representation of cyclone separator.
Fig. 3 is the top view of Fig. 2.
Fig. 4 is the structural representation of sack cleaner.
Fig. 5 is the top view of Fig. 4.
The specific embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is made a detailed explanation.
A kind of process units that utilizes direct method to produce silicon tetrachloride as shown in Figure 1, this device comprises liquid chlorine storage tank 1, chlorine liquid carburetor 3, silica flour feeding device 5, fluidized-bed reactor 6, primary cyclone 10, secondary cyclone 11, fiber bag precipitator 12, spray column 14, caustic wash tower 18 etc.Wherein between the entrance of the outlet of liquid chlorine storage tank 1 and chlorine liquid carburetor 3, with canned motor pump 2, be connected, be convenient to carrying out continuously of reaction.Between chlorine liquid carburetor 3 and fluidized-bed reactor 6, be connected with vacuum buffer tank 4, be convenient to stable being passed in fluidized-bed reactor 6 of air velocity of the chlorine after vaporization.Described silica flour feeding device 5 is connected with nitrogen pipeline 21 above, and nitrogen pipeline 21 is provided with valve, by valve, is controlled and continuously silica flour is added to fluidized-bed reactor 6 bottoms.Fluidized-bed reactor adopts the heating jacket of oil bath heating, and heating jacket is provided with conduction oil entrance 8 and conduction oil outlet 7.The gas outlet on fluidized-bed reactor 6 tops is connected with heat exchanger 9, and the discharging opening of heat exchanger 9 connects described primary cyclone 10.As shown in Figure 2 and Figure 3, the gas outlet on primary cyclone 10 tops connects described secondary cyclone 11, and the discharge gate of primary cyclone 10 and secondary cyclone 11 bottoms refluxes respectively and is connected to described fluidized-bed reactor 6.Fluidized-bed reactor 6 outlet products are after heat exchanger 9 coolings, gas crude product is after primary cyclone 10 is separated with secondary cyclone 11, and the most of solid fine silica powder in gas crude product reclaims to enter in fluidized-bed reactor 6 and continues as raw material reaction.The gas outlet on described secondary cyclone 11 tops connects described fiber bag precipitator 12, the bottom of fiber bag precipitator 12 is connected with fine powder recycling can 13, makes thinner silica flour a small amount of in gas crude product by entering fine powder recycling can 13 after sack cleaner 12 recovery.Sack cleaner 12 outlet products enter spray column 14, the SiCl of spray liquid for using through the condensed partial reflux of condenser 16 4crude product, the gas outlet on spray column 14 tops is connected with condenser 16, and the discharging opening of condenser 16 connects branch line, and branch line one end is connected with silicon tetrachloride crude product storage tank 17, the other end connects the shower nozzle of described spray column 14, and spray column 14 bottoms are the high slag slurry storage tank 15 that boils of liquid.The SiCl of silicon tetrachloride crude product storage tank 17 for gathering 4crude product, can be used for further rectification and purification and uses.Condenser 16 unreacted is out chlorine gas mixture completely, generates the products such as clorox through caustic wash tower 18 with NaOH solution reaction, and product clorox enters clorox storage tank 19 and collects, and other on-condensible gas is discharged through drain 20.
As shown in Figure 4, described fiber bag precipitator 12 comprises shell body 21 and a plurality of cloth bag device 32, in shell body 21, be provided with dividing plate 22, dividing plate 22 is divided into dedusting chamber 23 and outlet chamber 24 by shell body 21, lateral wall in dedusting chamber 23 is provided with heating jacket 29, heating jacket 29 adopts heat-conducting oil heating, on the top of heating jacket 29, be provided with oil-in 30, bottom is provided with oil-out 31, because silicon tetrachloride crude product gas is being lowered the temperature through primary cyclone 10 and secondary cyclone 11, if temperature is too low in fiber bag precipitator, can condense into liquid and stop up cloth bag device 32, therefore need to keep silicon tetrachloride crude product gas to mend by heating jacket 29 condenses.The top in dedusting chamber 23 is cylinder, bottom is cone, the top in dedusting chamber 23 is provided with deduster air inlet 25, deduster air inlet 25 connects the gas outlet on secondary cyclone 11 tops, in dedusting chamber, the inner side of deduster air inlet 25 23, be provided with gas block panel 36, at the lateral wall of cone, be provided with access hole 28.Described a plurality of cloth bag devices 32 all adopt high temperature resistant material, cloth bag device 32 is fixedly installed on dividing plate 22, dust outlet 27 is set in the bottom in dedusting chamber 23, and dust exports 27 belows and is provided with fine powder recycling can 13, and the sidewall of described outlet chamber 24 is provided with deduster gas outlet 26.
As shown in Figure 5, described fiber bag precipitator 12 is also connected with cloth bag pulsed dust-removing device, cloth bag pulsed dust-removing device comprises compressed air cylinder 33, a plurality of Venturi tube 35, pulse control instrument and a plurality of pulse valve 34, described a plurality of pulse valves 34 are arranged on a plurality of pipelines that are connected to compressed air cylinder and by pulse control instrument, are controlled respectively, a plurality of Venturi tubes 35 connect described a plurality of pipelines, and the gas outlet of a plurality of Venturi tubes 35 is connected respectively to the inside of described cloth bag device 32.And being also provided with pressure detecting module at fiber bag precipitator 12, described pressure detecting module is connected with pulse control instrument.In the process that dusty gas purifies by filter bag, along with the increase of time, the long-pending dust being attached on cloth bag device 32 is more and more, thereby the resistance of cloth bag device 32 is increased gradually, cause processing air quantity to reduce gradually, for normal operation, control resistance within the specific limits, by pressure detecting module, detect the pressure in fiber bag precipitator, at this moment when pressure is raised to limited range, by pulse control instrument, send instruction and trigger in order each control valve unbalanced pulse valve, compressed air in gas bag is ejected in each corresponding cloth bag device 32 by each aperture Venturi tube 35 of injection tube, 32 moments of cloth bag device sharply expand, make the long-pending dust releasing that is attached to cloth bag device 32 surfaces, cloth bag device 32 is regenerated.
Operation principle of the present invention is: the liquid chlorine in liquid chlorine storage tank 1 is input in chlorine liquid carburetor 3 and vaporizes to certain temperature through canned motor pump 2, chlorine gas regulates laggard fluidized-bed reactor 6 bottoms that enter by surge tank 4, directly reacts in fluidized-bed reactor 6 with the raw material silica flour from silica flour feeding device 5.Fluidized-bed reactor 6 outlet crude products are after one-level cyclonic separation 10 is separated with secondary cyclone 11, and the most of solid fine silica powder in gas crude product reclaims to enter in fluidized-bed reactor 6 and continues as raw material reaction.In gas crude product, a small amount of thinner silica flour enters fine powder recycling can 13 after reclaiming by sack cleaner 12.Sack cleaner 12 outlet products enter spray column 14, the SiCl of spray liquid for using through the condensed partial reflux of condenser 16 4crude product, spray column 14 bottoms are the high slag slurry storage tank 15 that boils of liquid.The SiCl of storage tank 17 for gathering 4crude product, can be used for further rectification and purification and uses.Condenser 16 unreacted is out chlorine gas mixture completely, generates the products such as clorox through caustic wash tower 18 with NaOH solution reaction, and product clorox enters storage tank 19 and collects, and other on-condensible gas is discharged through drain 20.

Claims (3)

1. a direct method is produced the fiber bag precipitator of silicon tetrachloride, this fiber bag precipitator (12) comprises shell body (21) and a plurality of cloth bag device (32), in shell body (21), be provided with dividing plate (22), dividing plate (22) is divided into dedusting chamber (23) and outlet chamber (24) by shell body (21), described cloth bag device (32) is fixedly installed on dividing plate (22), the top in dedusting chamber (23) is provided with deduster air inlet (25), dust outlet (27) is set in the bottom of dedusting chamber (23), dust outlet (27) below is provided with fine powder recycling can (13), the sidewall of described outlet chamber (24) is provided with deduster gas outlet (26), it is characterized in that: the lateral wall in dedusting chamber (23) is provided with heating jacket (29), and being provided with gas block panel (36) in the dedusting chamber, inner side (23) at deduster air inlet (25), described a plurality of cloth bag devices (32) all adopt high temperature resistant material, described fiber bag precipitator (12) is also connected with cloth bag pulsed dust-removing device and pressure detecting module, cloth bag pulsed dust-removing device comprises compressed air cylinder (33), a plurality of Venturi tube (35), pulse control instrument and a plurality of pulse valve (34), described a plurality of pulse valves (34) are arranged on a plurality of pipelines that are connected to compressed air cylinder (33) and by pulse control instrument, are controlled respectively, and described pressure detecting module is connected with pulse control instrument, a plurality of Venturi tubes (35) connect described a plurality of pipelines, and the gas outlet of a plurality of Venturi tubes (35) is connected respectively to the inside of described cloth bag device (32).
2. a kind of direct method according to claim 1 is produced the fiber bag precipitator of silicon tetrachloride, it is characterized in that: heating jacket (29) adopts heat-conducting oil heating, on the top of heating jacket (29), be provided with oil-in (30), bottom is provided with oil-out (31).
3. a kind of direct method according to claim 1 is produced the fiber bag precipitator of silicon tetrachloride, it is characterized in that: the top of dedusting chamber (23) is cylinder, and bottom is cone, at the lateral wall of cone, is provided with access hole (28).
CN201310547336.5A 2013-11-06 2013-11-06 Bag type dust collector for producing silicon tetrachloride by direct method Pending CN103566669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310547336.5A CN103566669A (en) 2013-11-06 2013-11-06 Bag type dust collector for producing silicon tetrachloride by direct method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310547336.5A CN103566669A (en) 2013-11-06 2013-11-06 Bag type dust collector for producing silicon tetrachloride by direct method

Publications (1)

Publication Number Publication Date
CN103566669A true CN103566669A (en) 2014-02-12

Family

ID=50039907

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310547336.5A Pending CN103566669A (en) 2013-11-06 2013-11-06 Bag type dust collector for producing silicon tetrachloride by direct method

Country Status (1)

Country Link
CN (1) CN103566669A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103816836A (en) * 2014-03-11 2014-05-28 南京高正农用化工有限公司 Drying flow granulation technology and device for paraquat water soluble granule spray
CN105582778A (en) * 2016-03-14 2016-05-18 江正云 Heating-type bag dust collection device
CN108421326A (en) * 2018-04-26 2018-08-21 浙江洁宇环保装备科技有限公司 A kind of psychro-environment Special bag type dust collector
CN109647077A (en) * 2019-01-07 2019-04-19 烽火通信科技股份有限公司 One kind depositing waste gas purification recovery device for OVD

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942962A (en) * 1974-05-08 1976-03-09 U.S. Filter Company Pulse jet and venturi liner
CN101301553A (en) * 2008-06-24 2008-11-12 江苏宇达电站辅机阀门制造有限公司 Method for cleaning superfine powder dust of bag-type dust remover and device thereof
CN201176443Y (en) * 2008-04-10 2009-01-07 北京首钢国际工程技术有限公司 Gas pipeline anti-corrosive apparatus and blast furnace gas dust removing apparatus by dry method
CN201423220Y (en) * 2008-12-12 2010-03-17 四川新光硅业科技有限责任公司 Bag-type dust-removing device and system thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942962A (en) * 1974-05-08 1976-03-09 U.S. Filter Company Pulse jet and venturi liner
CN201176443Y (en) * 2008-04-10 2009-01-07 北京首钢国际工程技术有限公司 Gas pipeline anti-corrosive apparatus and blast furnace gas dust removing apparatus by dry method
CN101301553A (en) * 2008-06-24 2008-11-12 江苏宇达电站辅机阀门制造有限公司 Method for cleaning superfine powder dust of bag-type dust remover and device thereof
CN201423220Y (en) * 2008-12-12 2010-03-17 四川新光硅业科技有限责任公司 Bag-type dust-removing device and system thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103816836A (en) * 2014-03-11 2014-05-28 南京高正农用化工有限公司 Drying flow granulation technology and device for paraquat water soluble granule spray
CN103816836B (en) * 2014-03-11 2015-05-27 南京高正农用化工有限公司 Drying flow granulation technology and device for paraquat water soluble granule spray
CN105582778A (en) * 2016-03-14 2016-05-18 江正云 Heating-type bag dust collection device
CN108421326A (en) * 2018-04-26 2018-08-21 浙江洁宇环保装备科技有限公司 A kind of psychro-environment Special bag type dust collector
CN109647077A (en) * 2019-01-07 2019-04-19 烽火通信科技股份有限公司 One kind depositing waste gas purification recovery device for OVD

Similar Documents

Publication Publication Date Title
CN101279735A (en) Production method and apparatus for trichlorosilane
CN103449445B (en) A kind of direct method produces the production equipment of silicon tetrachloride
CN103566669A (en) Bag type dust collector for producing silicon tetrachloride by direct method
CN102849745B (en) Dust removal process and system for trichlorosilane production
CN104925821B (en) Production system for producing fumed silica by utilizing silicon tetrachloride
CN102234117A (en) Hydrolysis method for material containing hydrolysable halogen atom
CN203529947U (en) Silicon powder recovery device for producing silicon tetrachloride by adopting direct method
CN203568858U (en) Production system for synthesis of silicon tetrachloride
CN1422805A (en) High-dispersion nano silicon dioxide preparation method
CN105502491A (en) Method for preparing ultrapure zirconium oxychloride and byproduct silicon tetrachloride through zircon sand boiling chlorination
CN103420382B (en) A kind of synthetic method of silicon tetrachloride and production system thereof
CN103570025B (en) A kind of direct method produces the silica powder recovering device of silicon tetrachloride
CN103553057B (en) A kind of method utilizing reaction rectification technique process chlorosilane waste gas
CN103449448B (en) Equipment for purification trichlorosilane
CN103449446B (en) Method for preparing trichlorosilane
CN203451228U (en) Production device for producing silicon tetrachloride by virtue of direct method
CN202297154U (en) Wet process dust removal device in trichlorosilane production
CN203507699U (en) Cloth bag type dust collector for producing silicon tetrachloride by using direct method
CN103449440B (en) Equipment for preparing polycrystalline silicon
CN102530897A (en) Method for preparing yellow phosphorus by utilizing multi-electrode phosphorus preparation electric furnace
CN102527179A (en) Electric de-dusting purifying device for phosphorus-making furnace gas
RU2394762C2 (en) Method of producing trichlorosilane
CN103435045B (en) A kind of distillation system of silicon tetrachloride crude product
CN203568857U (en) Rectification system for silicon tetrachloride crude product
CN114588845A (en) Synthesis system of phenyl chlorosilane

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: 324000 building 51, No. 2, Quzhou hi tech Industrial Park, Quzhou, Zhejiang, China

Applicant after: Zhejiang Fushite Group Co., Ltd.

Address before: 324102 Quzhou Jiangshan Economic Development Zone, Zhejiang province Jiang circuit, No. 19

Applicant before: Zhejiang Fushite Group Co., Ltd.

COR Change of bibliographic data
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20140212