JPS57152653A - Wafer processing equipment for ion implanting device - Google Patents

Wafer processing equipment for ion implanting device

Info

Publication number
JPS57152653A
JPS57152653A JP3723181A JP3723181A JPS57152653A JP S57152653 A JPS57152653 A JP S57152653A JP 3723181 A JP3723181 A JP 3723181A JP 3723181 A JP3723181 A JP 3723181A JP S57152653 A JPS57152653 A JP S57152653A
Authority
JP
Japan
Prior art keywords
disk
ion implanting
chamber
exchange
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3723181A
Other languages
Japanese (ja)
Inventor
Nobuhiro Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP3723181A priority Critical patent/JPS57152653A/en
Publication of JPS57152653A publication Critical patent/JPS57152653A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To secure the rapid exchange of a disk under vacuum condition by providing a lock chamber with an exchange device, which holds a disk sent from an ion implanting chamber and an exchange disk prepared within the lock chamber simultaneously. CONSTITUTION:A disk 3, to which a number of wafers 4 are fixed so that they can be freely detached, is rotated in a vacuum ion implanting chamber 1 equipped with an ion implanting hole 2 so as to subject the wafers 4 to ion implanting treatment carried out with ion beams introduced into the chamber 1 through the hole 2. A lock chamber 7 is provided with a disk exchange device, which can hold both the disk 3 sent from the chamber 1 and an exchange disk prepared within the lock chamber simultaneously and can be inserted into and withdrawn from the chamber 7 freely. After the above exchange disk is located on a transfer means 10, the disk 3 exhausted through the ion implanting is detached.
JP3723181A 1981-03-17 1981-03-17 Wafer processing equipment for ion implanting device Pending JPS57152653A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3723181A JPS57152653A (en) 1981-03-17 1981-03-17 Wafer processing equipment for ion implanting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3723181A JPS57152653A (en) 1981-03-17 1981-03-17 Wafer processing equipment for ion implanting device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57088111A Division JPS5816454A (en) 1982-05-26 1982-05-26 Wafer processing unit in ion implantation device

Publications (1)

Publication Number Publication Date
JPS57152653A true JPS57152653A (en) 1982-09-21

Family

ID=12491827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3723181A Pending JPS57152653A (en) 1981-03-17 1981-03-17 Wafer processing equipment for ion implanting device

Country Status (1)

Country Link
JP (1) JPS57152653A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382552U (en) * 1989-12-13 1991-08-22
US6330489B1 (en) 1998-10-21 2001-12-11 Nec Corporation Magnetic tape apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382552U (en) * 1989-12-13 1991-08-22
US6330489B1 (en) 1998-10-21 2001-12-11 Nec Corporation Magnetic tape apparatus

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