JPS5816454A - Wafer processing unit in ion implantation device - Google Patents

Abstract

PURPOSE:To facilitate the disk exchange work and to improve the wafer processing profficiency by providing a disk exchange unit capable of holding a disk which has been implanted with ions and a disk for exhange simultaneously on the door of a lock chamber with varying conditions. CONSTITUTION:A door 12 free of opening and closing is provided to a lock chamber 7 provided on one side of an ion implantation chamber and with its status varied into a vacuum condition or an atmospheric condition facing one side of the disk 3 shifted from the implantation chamber, and a disk 3a for exchange is provided on the other side, then a disk exchange unit 11 free of going in and out of the lock chamber 7 and capable of holding these disks 3, 3a simultaneously is provided on the door 12. The exchange unit 11 is provided with a cylindrical body 14, for instance, which penetrates in hermetic sealing the door 12 provided free of opening and closing at the back of the lock chamber 7, so that the cylindrical body 14 is reciprocated in the axial direction in the lock chamber by means of a fluid cylinder 13 provided outside the door 12. Accordingly, the processing profficiency of wafers can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an introductory device for an ion implantation device.

As an ion implantation device of this type, the applicant company previously developed a system in which a disk to which a plurality of sea urchins were attached was rotated once inside a constantly vacuumed ion implantation chamber equipped with an ion injection port, and ion beams were introduced through the injection port. 2) Perform the ion implantation process into the skeleton, and when the ion implantation process is completed, the disc is changed from the injection chamber to the atmospheric pressure state via a gauge pulp installed in the middle of the injection chamber. One ivy seal and one other o
# We proposed 2040 to be transported by means of transport, but after processing the processed sea urchins were placed in a vacuum ion implantation chamber and replaced with a replacement disk containing a new sea urchin. If obtained, ion implantation 1 [K] can be quickly performed without bringing it to atmospheric pressure.
I like that I can improve my ability.

I am in charge of this matter and will provide nine processing equipment to it.
A disk with multiple O-uni^ removably attached to it is rotated once in a constantly vacuumed ion implantation chamber equipped with an ion injection port, and the ion beams introduced through the injection port are implanted. The ion implantation process is performed on the two, and the disk is transferred from the injection chamber to the ivy chamber, which changes between a vacuum state and an atmospheric pressure state via a pulp (a game machine that can be opened and closed). In the type of transport, 1IvI ivy li
A door that can be opened and closed is provided opposite one of the disks sent there, and a replacement disk is provided on the other side, and the disk can be moved in and out of the laminate, and these disks can be held at the same time. A disk exchange device is provided.

To explain 01 example of the present invention device with reference to the drawings, the 111F
i This is a double cross-sectional plan view of the whole, and 11! &
(1) is a relatively flat ion implantation chamber that is constantly vacuumed by a vacuum pump; Maki's wafer (shows a disk that rotates 11 times with four rips attached, and the yi disk (3) is formed into a disk shape, for example, as in No. 1! Kakiji, and has a plurality of circles formed with holes near its dovetail edge. Each wafer (4) is fitted with a stopper (
6), it is removably attached. (7) refers to the ion implantation room (8) the ion implantation chamber <U and the −
Relatively long mouth part 011 communicating with the ivy chamber (7), (9
) indicates the gate pulp that opens and closes the opening (8), and the disc (3) is the carriage and other Os sending gate IK (7) and the ion implantation 11 (1). I was moved back and forth between the two.

The above structure must be a member of the previous KIN case 94.
The device of the present invention is equipped with a disk (3301) transferred from the injection chamber (7) that can be opened and closed freely, and a replacement disk (3301) on the other side.
A disc changing device aυ is provided at the door (1, 1) that can freely enter and retract into the helmet room (7) and that can freely grasp the sliding disc (3) (3 m) at the same time. Disk (31 (
1m) to enable O exchange, and then install the K1In ivy chamber (
7) Installation of the replacement disk (S&) and the ivy 11
It should be possible to easily remove the disk (3) from (7).

To explain this in more detail, the exchange device αυ is, for example, a removable a.
The axillary cylinder body 14 is equipped with a cylinder shaft that airtightly passes through the mouth.
2) When reciprocated in the axial direction, the undulating claws (a) and (c), which are approximately figure 8-shaped on the round side, are set in two rows at the tip with an interval of ms, and the undulating claws (a) and (c) are placed in the rotor's center. Make it move back and forth,
A piston is provided within the cylinder 114), and when this piston is reciprocated by the pressure of air or other fluid, the piston t? The engagement electric wheels at the tips of 10 reciprocate and operate simultaneously between the 9-disc gripping state and the 91-m state in relation to the undulating claw pieces Li1uts. aSo! For example, one set of mounting members is attached to the tip of the cylinder a4.
KL and each set Kti are arranged at equal intervals as shown in 11.
It is swingably supported by a support shaft, and two large undulating claw pieces (■) are provided at the front and rear, and the front and rear sides each have four undulating claw pieces (II). i
a) is held in the inner part of the adventurer II ('iF) by a plate or other locking member (2) in such a way that it will not fall off and can be removed from the front; in this case, the disc (6 &
) is formed in this and arranged so that the nine-center hole (2) coincides with the axis of the cylindrical body a40.

Ion implantation 1! The means for transporting the disk (3) between +11 and the stomach tube (7) is a generally rectangular surrounding frame (2) equipped with a disk holding device 0, as shown in Figure 2 and Figure S. Furthermore, the axillary disk holding device (c) is configured by, for example, the disks (3) at the four corners of the seven lanes.
It consists of a support piece (C) that supports the edge of the disc (310) and a two-pronged glue-la at the tip (310) that is elastically protruded by a spring (2) and supports both sides of the disc (310). rn is connected behind it, and when the 9 wires (2) are pulled by the levers provided on the left and right of the 7 wires, the scissors spring (to) is immersed against K.
Thus, it is permissible to remove the disc (3) from the 7-ray (2) or to use a replacement disc (1x).

The lever @ (2) is the cylinder OI that comes out and retracts from the Ii1% side of each chamber +1) (7) when the disk attachment/detachment position Kl1 means αG of the ion implantation 11 (1) or the Hirota Tsuta Seal (7) can be stopped. It is activated by being pressed by a
The sound is immovable (1 each! (11 (7) has a Nitsukupinro υechin that can appear at will.
A rack @ is attached to one side of the rack, and a rack is attached to this rack with a tie-ring belt (to) and other parts (each unit (l) that rotates synchronously).
)) When the gear shafts in
(7) Wheels on the rails aS#s provided for each K (towards)
drive.

(b) shows a closed container that moves left and right in the ion implantation chamber (O) by an electric motor (to); A disk (3) that can appear and appear at will and rotates the disk (3).
A rotatable O-extending and retracting rotation device (to) is housed, and the disc (3
Inject the ion beam into each sea urchin 8 (4) KM- of 1, and 9, -1 inject the gate pulp (9) into the -mouth part (8).
The guide rail 41111 that guides the valve (9) in the OIII direction is a large cylinder that presses the valve (9) against it to seal it.

To explain the operation, the rotation of the vacuum ion implantation chamber (end) causes the rotation of the disk (3) held by the device (end).
(4) Ion beams are injected evenly into K, and when the ion implantation process is completed, the disk (3) is transferred to the transfer means α (IK tower) by the Fi shell device I.
g through the open opening (8) of the gate pulp (9) into the evacuated ivy 11 ()). Base mold (7)
Inside, a replacement disk (e&) is prepared in advance at the back of the cylinder (O), and when the means αG stops in front of it, the disk exchange device (■) is inserted into the cylinder α3 & e stone a/O (by JIK).
The undulating claw protrudes with one side facing down, and plunges into each center hole (2) of the front disk (33) and the replacement disk (S&).After this, if the piston aS is reversely operated, the double O
Relief claw piece as #E 44 f 4 X? (8)
(lla) 0 Middle < p hole @ Stand up all at once in the ring at 11, and both distas are grasped at the same time. Furthermore, when the Kll feeding means I/O disk holding device (to) is released and the cylinder n is extended, the replacement disk (i a) is moved to the S passing means aθ.
The disk (3) can be moved to the O position and the means al
The disk is removed from the ivy chamber (7) and moved to the O cabinet just before the door of the ivy chamber (7), and the disk holding device is operated to hold the replacement disk (1a) on the transfer means aQ. Afterwards, the screw (Ie) is reversely operated to turn the undulating claw piece (c) upside down, and the cylinder 0 is further extended and the claw piece (lS) is removed from the replacement disk (5a) and becomes as shown in giWJ. A replacement disk (50) is mounted on the transfer means (a), and the disk (3) after ion implantation is removed.

The transfer is to ion implantation 1 [111] to mount the replacement disk (3a) and implant ions into it. ]
When the gate pulp (9) is closed, the lock (7) is set to -atmospheric pressure, and the door 0 is opened to finish the ion implantation and the disk (3) is taken out, and a new replacement disk or lock wealth (7) 0 is inserted. The elE door 11 prepared for 111 is, for example, a stomach tsuke 1 centered on books! (7), but when the door is opened, the ion-implanted disk 13 is hung on the disk exchange device 11) installed in the door a3 and taken out of the liter seal (7). Replacement work becomes easier. When dista o cross I11 ends l [v ivy II
Close the door I of ('F) to create a vacuum and wait for the distar to be sent from the ion implantation chamber (1) again.

In this way, according to the present invention, 11 of the ion implantation chamber entrance)
In a, we installed a disk exchange device that can freely hold the ion-implanted disk and the replacement disk at the same time on the openable door of the Tatsuta room, which changes between vacuum state and atmospheric pressure, so the door can be opened. At the same time, the disk can be taken out of the enemy's possession,
I love that the disk replacement work is easy and can be done in a short time.
This has the effect of improving processing efficiency.

[Brief explanation of the drawing]

Fig. 1 is a cutting plan view of an example of the device of the present invention, No. 21! 511i1J is m in Figure 1.
-m5 enlarged sectional view, Figure 4 is tvTV -TV line sectional view, Figure 4! Figure 1 is a partially enlarged sectional view of Figure 1g2, No. 411t
is an enlarged cross-sectional view taken along line VI-Vl in FIG. 2; (1)...Ion implantation chamber (21...Ion injection port (31...Disk Qla)...Replacement disk (4)--Ue ^ (7)...Tatsuta chamber (9)...Gate pulp commander...Transfer means 6υ...Disc exchange device a...2 people outside the door

Claims (1)

[Claims] II &Maki's Uni^ is removably attached to the disc, which is equipped with an ion injection port and is rotated in a vacuum O ion implantation chamber, and the ion beam is introduced through the injection port.
After performing the sea urchin injection process, the Mukuro disk is transferred from the injection chamber to one of the disks through the pulp, which can be opened and closed, to the Tatsuku Tomi, which fluctuates to a vacuum state and atmospheric pressure. I was fixated on things that could be transported, and I thought,
A disk changing device which has an OSt stage that can be opened and closed facing one side of the disks that are coming in, and has a disk for replacement on the other side, and can freely move in and out of the four-sided space and can hold these disks at the same time. An ion implantation device comprising: