JPS57143853A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS57143853A
JPS57143853A JP56030205A JP3020581A JPS57143853A JP S57143853 A JPS57143853 A JP S57143853A JP 56030205 A JP56030205 A JP 56030205A JP 3020581 A JP3020581 A JP 3020581A JP S57143853 A JPS57143853 A JP S57143853A
Authority
JP
Japan
Prior art keywords
load resistor
film
polycrystal
impurity
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56030205A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6259463B2 (enrdf_load_stackoverflow
Inventor
Toshinobu Yanase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56030205A priority Critical patent/JPS57143853A/ja
Publication of JPS57143853A publication Critical patent/JPS57143853A/ja
Publication of JPS6259463B2 publication Critical patent/JPS6259463B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP56030205A 1981-03-03 1981-03-03 Semiconductor device Granted JPS57143853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56030205A JPS57143853A (en) 1981-03-03 1981-03-03 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56030205A JPS57143853A (en) 1981-03-03 1981-03-03 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57143853A true JPS57143853A (en) 1982-09-06
JPS6259463B2 JPS6259463B2 (enrdf_load_stackoverflow) 1987-12-11

Family

ID=12297228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56030205A Granted JPS57143853A (en) 1981-03-03 1981-03-03 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57143853A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144457A (ja) * 1984-08-09 1986-03-04 Nec Corp スタテイツク型半導体メモリ
JPS61292951A (ja) * 1985-06-21 1986-12-23 Hitachi Ltd 半導体集積回路装置の製法
JPH01128448A (ja) * 1987-11-12 1989-05-22 Toshiba Corp 半導体装置の配線接続部
US5691618A (en) * 1992-11-16 1997-11-25 Yupiteru Industries Co., Ltd. Battery pack charging device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144457A (ja) * 1984-08-09 1986-03-04 Nec Corp スタテイツク型半導体メモリ
JPS61292951A (ja) * 1985-06-21 1986-12-23 Hitachi Ltd 半導体集積回路装置の製法
JPH01128448A (ja) * 1987-11-12 1989-05-22 Toshiba Corp 半導体装置の配線接続部
US5691618A (en) * 1992-11-16 1997-11-25 Yupiteru Industries Co., Ltd. Battery pack charging device

Also Published As

Publication number Publication date
JPS6259463B2 (enrdf_load_stackoverflow) 1987-12-11

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