JPS5713759A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5713759A
JPS5713759A JP8937180A JP8937180A JPS5713759A JP S5713759 A JPS5713759 A JP S5713759A JP 8937180 A JP8937180 A JP 8937180A JP 8937180 A JP8937180 A JP 8937180A JP S5713759 A JPS5713759 A JP S5713759A
Authority
JP
Japan
Prior art keywords
silicon film
film
groove
nitrided
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8937180A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131311B2 (enrdf_load_stackoverflow
Inventor
Akira Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8937180A priority Critical patent/JPS5713759A/ja
Publication of JPS5713759A publication Critical patent/JPS5713759A/ja
Publication of JPH0131311B2 publication Critical patent/JPH0131311B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Bipolar Transistors (AREA)
JP8937180A 1980-06-30 1980-06-30 Manufacture of semiconductor device Granted JPS5713759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8937180A JPS5713759A (en) 1980-06-30 1980-06-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8937180A JPS5713759A (en) 1980-06-30 1980-06-30 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5713759A true JPS5713759A (en) 1982-01-23
JPH0131311B2 JPH0131311B2 (enrdf_load_stackoverflow) 1989-06-26

Family

ID=13968827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8937180A Granted JPS5713759A (en) 1980-06-30 1980-06-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5713759A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0131311B2 (enrdf_load_stackoverflow) 1989-06-26

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