JPS57118681A - Manufacture of semiconductor light emitting diode - Google Patents
Manufacture of semiconductor light emitting diodeInfo
- Publication number
- JPS57118681A JPS57118681A JP439281A JP439281A JPS57118681A JP S57118681 A JPS57118681 A JP S57118681A JP 439281 A JP439281 A JP 439281A JP 439281 A JP439281 A JP 439281A JP S57118681 A JPS57118681 A JP S57118681A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- light emitting
- layer
- emitting surface
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 239000000956 alloy Substances 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
PURPOSE:To reduce curvature radius and enhance electrode adherence by a method wherein the electrode provided around the light emitting surface on a semiconductor light emitting device is coated with an insulating layer serving as a mask in an light emitting surface etching process and then the electrode is made into an alloy in a heat treatment. CONSTITUTION:An N type window layer 102, an active layer 103 and a P type limiting layer 104 are formed and a P type electrode 105 (106 for insulating) and an Au layer 107 are provided on a GaAs substrate, and then the substrate is removed. Then an N type electrode 108 is built surrounding the N type window layer 102 and the electrode 108 is coated with an SiO2 layer 109. The SiO2 layer 109 serves as a mask when a curvature is formed by etching on the light emitting surface. Next, the electrode is transformed into an alloy in a heat treatment and, lastly, a non-reflective SiO2 coat 110 is formed covering the light emitting surface. This setup provides a reduced radius of curvature for the light emitting surface and an increased adherence feature for the electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP439281A JPS57118681A (en) | 1981-01-14 | 1981-01-14 | Manufacture of semiconductor light emitting diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP439281A JPS57118681A (en) | 1981-01-14 | 1981-01-14 | Manufacture of semiconductor light emitting diode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57118681A true JPS57118681A (en) | 1982-07-23 |
Family
ID=11583076
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP439281A Pending JPS57118681A (en) | 1981-01-14 | 1981-01-14 | Manufacture of semiconductor light emitting diode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57118681A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01156573U (en) * | 1988-04-14 | 1989-10-27 | ||
JPH0691283B2 (en) * | 1984-11-21 | 1994-11-14 | アメリカン テレフオン アンド テレグラフ カムパニ− | Asymmetrical structure of LED chip |
JPH11298046A (en) * | 1998-03-18 | 1999-10-29 | Trw Inc | Manufacture of semiconductor optical microlens |
-
1981
- 1981-01-14 JP JP439281A patent/JPS57118681A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0691283B2 (en) * | 1984-11-21 | 1994-11-14 | アメリカン テレフオン アンド テレグラフ カムパニ− | Asymmetrical structure of LED chip |
JPH01156573U (en) * | 1988-04-14 | 1989-10-27 | ||
JPH11298046A (en) * | 1998-03-18 | 1999-10-29 | Trw Inc | Manufacture of semiconductor optical microlens |
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