JPS5694651A - Manufacture of material for electronic parts - Google Patents

Manufacture of material for electronic parts

Info

Publication number
JPS5694651A
JPS5694651A JP17028679A JP17028679A JPS5694651A JP S5694651 A JPS5694651 A JP S5694651A JP 17028679 A JP17028679 A JP 17028679A JP 17028679 A JP17028679 A JP 17028679A JP S5694651 A JPS5694651 A JP S5694651A
Authority
JP
Japan
Prior art keywords
titanic
alcohol
substrate
alkoxide
carboxylic acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17028679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6366903B2 (enExample
Inventor
Mitsuaki Minato
Muneo Nakayama
Akira Hashimoto
Toshihiro Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO DENSHI KAGAKU KABUSHIKI
Tokyo Denshi Kagaku KK
Original Assignee
TOKYO DENSHI KAGAKU KABUSHIKI
Tokyo Denshi Kagaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO DENSHI KAGAKU KABUSHIKI, Tokyo Denshi Kagaku KK filed Critical TOKYO DENSHI KAGAKU KABUSHIKI
Priority to JP17028679A priority Critical patent/JPS5694651A/ja
Publication of JPS5694651A publication Critical patent/JPS5694651A/ja
Publication of JPS6366903B2 publication Critical patent/JPS6366903B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—

Landscapes

  • Chemically Coating (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP17028679A 1979-12-28 1979-12-28 Manufacture of material for electronic parts Granted JPS5694651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17028679A JPS5694651A (en) 1979-12-28 1979-12-28 Manufacture of material for electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17028679A JPS5694651A (en) 1979-12-28 1979-12-28 Manufacture of material for electronic parts

Publications (2)

Publication Number Publication Date
JPS5694651A true JPS5694651A (en) 1981-07-31
JPS6366903B2 JPS6366903B2 (enExample) 1988-12-22

Family

ID=15902124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17028679A Granted JPS5694651A (en) 1979-12-28 1979-12-28 Manufacture of material for electronic parts

Country Status (1)

Country Link
JP (1) JPS5694651A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325930A (ja) * 1986-07-18 1988-02-03 Toshiba Components Kk 半導体装置
JP2016532739A (ja) * 2013-06-28 2016-10-20 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ 可溶性金属酸化物カルボキシレートのスピンオン組成物及びそれらの使用方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314699A (en) * 1976-07-23 1978-02-09 Pechiney Aluminium Alumina mass having good mechanical strength and method of making same
JPS55167130A (en) * 1979-06-12 1980-12-26 Hitachi Ltd Metal oxide thin film forming method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314699A (en) * 1976-07-23 1978-02-09 Pechiney Aluminium Alumina mass having good mechanical strength and method of making same
JPS55167130A (en) * 1979-06-12 1980-12-26 Hitachi Ltd Metal oxide thin film forming method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325930A (ja) * 1986-07-18 1988-02-03 Toshiba Components Kk 半導体装置
JP2016532739A (ja) * 2013-06-28 2016-10-20 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ 可溶性金属酸化物カルボキシレートのスピンオン組成物及びそれらの使用方法

Also Published As

Publication number Publication date
JPS6366903B2 (enExample) 1988-12-22

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