JPS5690561A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5690561A JPS5690561A JP16732779A JP16732779A JPS5690561A JP S5690561 A JPS5690561 A JP S5690561A JP 16732779 A JP16732779 A JP 16732779A JP 16732779 A JP16732779 A JP 16732779A JP S5690561 A JPS5690561 A JP S5690561A
- Authority
- JP
- Japan
- Prior art keywords
- sio2
- type
- layer
- base
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 8
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical compound [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 1
- 229910021339 platinum silicide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1004—Base region of bipolar transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE:To obtain a bipolar transistor, base resistance thereof is extremely little and which is integrated to a high degree, by a method wherein the whole surface of a base layer is covered with a base electrode in the vicinity of an emitter layer, and patternings of every kind can be executed by self-matching. CONSTITUTION:Field oxide films 12 and an N type base layer 14 are formed to an N type Si substrate 10, N type poly Si 16 and SiO2 18 are laminated, a resist mask 20 is executed and the layers 18, 16 are etched. P type poly Si 22a-22c is evaporated, and the mask 20 is removed by plasma incineration. When a surface is covered with CVD SiO2 24, SiO2 is also filled to an eave section of the film 18. An N type emitter layer 26 is made up by heat treatment and diffusion from the N layer 16. B ions are injected to the SiO2 24, 18 again, and sections 24a are left by etching by a HF liquid. When Pt is spattered, the whole is thermally treated and a surface is etched, platinum silicide films 28a-28c are left selectively. According to this constitution, a bipolar device having a minute pattern and little base resistance can be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16732779A JPS5690561A (en) | 1979-12-22 | 1979-12-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16732779A JPS5690561A (en) | 1979-12-22 | 1979-12-22 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5690561A true JPS5690561A (en) | 1981-07-22 |
| JPS6220711B2 JPS6220711B2 (en) | 1987-05-08 |
Family
ID=15847684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16732779A Granted JPS5690561A (en) | 1979-12-22 | 1979-12-22 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5690561A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58169971A (en) * | 1982-03-30 | 1983-10-06 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
| JPS5961179A (en) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | Manufacture of bipolar semiconductor device |
| EP0199061A2 (en) * | 1985-03-23 | 1986-10-29 | Itt Industries, Inc. | Semiconductor devices |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0666822U (en) * | 1993-03-01 | 1994-09-20 | トヨタ車体株式会社 | Pressure control device for die cushion pin |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53123083A (en) * | 1977-04-01 | 1978-10-27 | Nippon Telegr & Teleph Corp <Ntt> | Production of semiconductor device |
-
1979
- 1979-12-22 JP JP16732779A patent/JPS5690561A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53123083A (en) * | 1977-04-01 | 1978-10-27 | Nippon Telegr & Teleph Corp <Ntt> | Production of semiconductor device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58169971A (en) * | 1982-03-30 | 1983-10-06 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
| JPH0247853B2 (en) * | 1982-03-30 | 1990-10-23 | Fujitsu Ltd | |
| JPS5961179A (en) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | Manufacture of bipolar semiconductor device |
| EP0199061A2 (en) * | 1985-03-23 | 1986-10-29 | Itt Industries, Inc. | Semiconductor devices |
| EP0202727A2 (en) * | 1985-03-23 | 1986-11-26 | Northern Telecom Europe Limited | Semiconductor devices |
| EP0199061A3 (en) * | 1985-03-23 | 1988-03-30 | Itt Industries, Inc. | Semiconductor devices |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6220711B2 (en) | 1987-05-08 |
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