JPS5678154A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5678154A
JPS5678154A JP15460179A JP15460179A JPS5678154A JP S5678154 A JPS5678154 A JP S5678154A JP 15460179 A JP15460179 A JP 15460179A JP 15460179 A JP15460179 A JP 15460179A JP S5678154 A JPS5678154 A JP S5678154A
Authority
JP
Japan
Prior art keywords
layer
film
type
regions
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15460179A
Other languages
English (en)
Other versions
JPS639668B2 (ja
Inventor
Kazuyoshi Shinada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP15460179A priority Critical patent/JPS5678154A/ja
Priority to DE8080107315T priority patent/DE3071489D1/de
Priority to EP80107315A priority patent/EP0029986B1/en
Priority to US06/210,749 priority patent/US4338139A/en
Publication of JPS5678154A publication Critical patent/JPS5678154A/ja
Publication of JPS639668B2 publication Critical patent/JPS639668B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Logic Circuits (AREA)
JP15460179A 1979-11-29 1979-11-29 Manufacture of semiconductor device Granted JPS5678154A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP15460179A JPS5678154A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor device
DE8080107315T DE3071489D1 (en) 1979-11-29 1980-11-24 Method of manufacturing a semiconductor device with a schottky junction
EP80107315A EP0029986B1 (en) 1979-11-29 1980-11-24 Method of manufacturing a semiconductor device with a schottky junction
US06/210,749 US4338139A (en) 1979-11-29 1980-11-26 Method of forming Schottky-I2 L devices by implantation and laser bombardment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15460179A JPS5678154A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5678154A true JPS5678154A (en) 1981-06-26
JPS639668B2 JPS639668B2 (ja) 1988-03-01

Family

ID=15587741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15460179A Granted JPS5678154A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5678154A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60240156A (ja) * 1984-05-14 1985-11-29 Agency Of Ind Science & Technol 耐放射線半導体集積回路装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60240156A (ja) * 1984-05-14 1985-11-29 Agency Of Ind Science & Technol 耐放射線半導体集積回路装置
JPH0467341B2 (ja) * 1984-05-14 1992-10-28 Kogyo Gijutsuin

Also Published As

Publication number Publication date
JPS639668B2 (ja) 1988-03-01

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