JPS567429A - Patterning device - Google Patents

Patterning device

Info

Publication number
JPS567429A
JPS567429A JP8134579A JP8134579A JPS567429A JP S567429 A JPS567429 A JP S567429A JP 8134579 A JP8134579 A JP 8134579A JP 8134579 A JP8134579 A JP 8134579A JP S567429 A JPS567429 A JP S567429A
Authority
JP
Japan
Prior art keywords
defect
signals
pattern
circuit
reflected electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8134579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228572B2 (enrdf_load_stackoverflow
Inventor
Fumio Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP8134579A priority Critical patent/JPS567429A/ja
Publication of JPS567429A publication Critical patent/JPS567429A/ja
Publication of JPS6228572B2 publication Critical patent/JPS6228572B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP8134579A 1979-06-29 1979-06-29 Patterning device Granted JPS567429A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8134579A JPS567429A (en) 1979-06-29 1979-06-29 Patterning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8134579A JPS567429A (en) 1979-06-29 1979-06-29 Patterning device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP60215087A Division JPS61116851A (ja) 1985-09-30 1985-09-30 検査装置
JP60215088A Division JPS61116852A (ja) 1985-09-30 1985-09-30 レジスト膜中の塵挨検査方法

Publications (2)

Publication Number Publication Date
JPS567429A true JPS567429A (en) 1981-01-26
JPS6228572B2 JPS6228572B2 (enrdf_load_stackoverflow) 1987-06-22

Family

ID=13743771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8134579A Granted JPS567429A (en) 1979-06-29 1979-06-29 Patterning device

Country Status (1)

Country Link
JP (1) JPS567429A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6317523A (ja) * 1986-07-09 1988-01-25 Toshiba Mach Co Ltd 電子ビ−ム描画装置
JPH02177833A (ja) * 1988-12-28 1990-07-10 Ide Shigiyoo Kk 動物用の糞尿処理材、糞尿処理材の製造方法、及び糞尿処理材の製造装置
JPH06296667A (ja) * 1993-04-14 1994-10-25 Tomoegawa Paper Co Ltd 脱臭性ペレット及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6317523A (ja) * 1986-07-09 1988-01-25 Toshiba Mach Co Ltd 電子ビ−ム描画装置
JPH02177833A (ja) * 1988-12-28 1990-07-10 Ide Shigiyoo Kk 動物用の糞尿処理材、糞尿処理材の製造方法、及び糞尿処理材の製造装置
JPH06296667A (ja) * 1993-04-14 1994-10-25 Tomoegawa Paper Co Ltd 脱臭性ペレット及びその製造方法

Also Published As

Publication number Publication date
JPS6228572B2 (enrdf_load_stackoverflow) 1987-06-22

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