JPS5315076A - Electron beam position detection method - Google Patents

Electron beam position detection method

Info

Publication number
JPS5315076A
JPS5315076A JP8905576A JP8905576A JPS5315076A JP S5315076 A JPS5315076 A JP S5315076A JP 8905576 A JP8905576 A JP 8905576A JP 8905576 A JP8905576 A JP 8905576A JP S5315076 A JPS5315076 A JP S5315076A
Authority
JP
Japan
Prior art keywords
electron
detection
scanning
marks
plural
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8905576A
Other languages
Japanese (ja)
Inventor
Korehito Matsuda
Original Assignee
Nippon Telegr & Teleph Corp <Ntt>
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegr & Teleph Corp <Ntt> filed Critical Nippon Telegr & Teleph Corp <Ntt>
Priority to JP8905576A priority Critical patent/JPS5315076A/en
Publication of JPS5315076A publication Critical patent/JPS5315076A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To detect the plural position reference marks provided on a substrate in the scanning direction of an electron beam by one scanning and determine the reference position from the detected data thereof.
COPYRIGHT: (C)1978,JPO&Japio
JP8905576A 1976-07-28 1976-07-28 Electron beam position detection method Pending JPS5315076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8905576A JPS5315076A (en) 1976-07-28 1976-07-28 Electron beam position detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8905576A JPS5315076A (en) 1976-07-28 1976-07-28 Electron beam position detection method

Publications (1)

Publication Number Publication Date
JPS5315076A true JPS5315076A (en) 1978-02-10

Family

ID=13960167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8905576A Pending JPS5315076A (en) 1976-07-28 1976-07-28 Electron beam position detection method

Country Status (1)

Country Link
JP (1) JPS5315076A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431698A (en) * 1977-08-12 1979-03-08 Nippon Electron Optics Lab Method of and device for detecting mark position in charged particle beam machining

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023782A (en) * 1973-06-08 1975-03-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023782A (en) * 1973-06-08 1975-03-14

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431698A (en) * 1977-08-12 1979-03-08 Nippon Electron Optics Lab Method of and device for detecting mark position in charged particle beam machining
JPS5746210B2 (en) * 1977-08-12 1982-10-01

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