JPS5315076A - Electron beam position detection method - Google Patents

Electron beam position detection method

Info

Publication number
JPS5315076A
JPS5315076A JP8905576A JP8905576A JPS5315076A JP S5315076 A JPS5315076 A JP S5315076A JP 8905576 A JP8905576 A JP 8905576A JP 8905576 A JP8905576 A JP 8905576A JP S5315076 A JPS5315076 A JP S5315076A
Authority
JP
Japan
Prior art keywords
electron beam
detection method
position detection
beam position
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8905576A
Other languages
Japanese (ja)
Inventor
Korehito Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8905576A priority Critical patent/JPS5315076A/en
Publication of JPS5315076A publication Critical patent/JPS5315076A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To detect the plural position reference marks provided on a substrate in the scanning direction of an electron beam by one scanning and determine the reference position from the detected data thereof.
COPYRIGHT: (C)1978,JPO&Japio
JP8905576A 1976-07-28 1976-07-28 Electron beam position detection method Pending JPS5315076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8905576A JPS5315076A (en) 1976-07-28 1976-07-28 Electron beam position detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8905576A JPS5315076A (en) 1976-07-28 1976-07-28 Electron beam position detection method

Publications (1)

Publication Number Publication Date
JPS5315076A true JPS5315076A (en) 1978-02-10

Family

ID=13960167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8905576A Pending JPS5315076A (en) 1976-07-28 1976-07-28 Electron beam position detection method

Country Status (1)

Country Link
JP (1) JPS5315076A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431698A (en) * 1977-08-12 1979-03-08 Nippon Electron Optics Lab Method of and device for detecting mark position in charged particle beam machining

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023782A (en) * 1973-06-08 1975-03-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023782A (en) * 1973-06-08 1975-03-14

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431698A (en) * 1977-08-12 1979-03-08 Nippon Electron Optics Lab Method of and device for detecting mark position in charged particle beam machining
JPS5746210B2 (en) * 1977-08-12 1982-10-01

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