JPS5315076A - Electron beam position detection method - Google Patents
Electron beam position detection methodInfo
- Publication number
- JPS5315076A JPS5315076A JP8905576A JP8905576A JPS5315076A JP S5315076 A JPS5315076 A JP S5315076A JP 8905576 A JP8905576 A JP 8905576A JP 8905576 A JP8905576 A JP 8905576A JP S5315076 A JPS5315076 A JP S5315076A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- detection method
- position detection
- beam position
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To detect the plural position reference marks provided on a substrate in the scanning direction of an electron beam by one scanning and determine the reference position from the detected data thereof.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8905576A JPS5315076A (en) | 1976-07-28 | 1976-07-28 | Electron beam position detection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8905576A JPS5315076A (en) | 1976-07-28 | 1976-07-28 | Electron beam position detection method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5315076A true JPS5315076A (en) | 1978-02-10 |
Family
ID=13960167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8905576A Pending JPS5315076A (en) | 1976-07-28 | 1976-07-28 | Electron beam position detection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5315076A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5431698A (en) * | 1977-08-12 | 1979-03-08 | Nippon Electron Optics Lab | Method of and device for detecting mark position in charged particle beam machining |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023782A (en) * | 1973-06-08 | 1975-03-14 |
-
1976
- 1976-07-28 JP JP8905576A patent/JPS5315076A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023782A (en) * | 1973-06-08 | 1975-03-14 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5431698A (en) * | 1977-08-12 | 1979-03-08 | Nippon Electron Optics Lab | Method of and device for detecting mark position in charged particle beam machining |
JPS5746210B2 (en) * | 1977-08-12 | 1982-10-01 |
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