JPS6228572B2 - - Google Patents

Info

Publication number
JPS6228572B2
JPS6228572B2 JP8134579A JP8134579A JPS6228572B2 JP S6228572 B2 JPS6228572 B2 JP S6228572B2 JP 8134579 A JP8134579 A JP 8134579A JP 8134579 A JP8134579 A JP 8134579A JP S6228572 B2 JPS6228572 B2 JP S6228572B2
Authority
JP
Japan
Prior art keywords
pattern
signal
sample
electron beam
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8134579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS567429A (en
Inventor
Fumio Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP8134579A priority Critical patent/JPS567429A/ja
Publication of JPS567429A publication Critical patent/JPS567429A/ja
Publication of JPS6228572B2 publication Critical patent/JPS6228572B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP8134579A 1979-06-29 1979-06-29 Patterning device Granted JPS567429A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8134579A JPS567429A (en) 1979-06-29 1979-06-29 Patterning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8134579A JPS567429A (en) 1979-06-29 1979-06-29 Patterning device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP60215087A Division JPS61116851A (ja) 1985-09-30 1985-09-30 検査装置
JP60215088A Division JPS61116852A (ja) 1985-09-30 1985-09-30 レジスト膜中の塵挨検査方法

Publications (2)

Publication Number Publication Date
JPS567429A JPS567429A (en) 1981-01-26
JPS6228572B2 true JPS6228572B2 (enrdf_load_stackoverflow) 1987-06-22

Family

ID=13743771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8134579A Granted JPS567429A (en) 1979-06-29 1979-06-29 Patterning device

Country Status (1)

Country Link
JP (1) JPS567429A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07118440B2 (ja) * 1986-07-09 1995-12-18 東芝機械株式会社 電子ビ−ム描画装置
JP2516060B2 (ja) * 1988-12-28 1996-07-10 イデシギョー株式会社 動物用の糞尿処理材、糞尿処理材の製造方法、及び糞尿処理材の製造装置
JPH06296667A (ja) * 1993-04-14 1994-10-25 Tomoegawa Paper Co Ltd 脱臭性ペレット及びその製造方法

Also Published As

Publication number Publication date
JPS567429A (en) 1981-01-26

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