JPS5513874A - Measuring method for distribution of electron beam current density - Google Patents
Measuring method for distribution of electron beam current densityInfo
- Publication number
- JPS5513874A JPS5513874A JP8669978A JP8669978A JPS5513874A JP S5513874 A JPS5513874 A JP S5513874A JP 8669978 A JP8669978 A JP 8669978A JP 8669978 A JP8669978 A JP 8669978A JP S5513874 A JPS5513874 A JP S5513874A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- current density
- electron
- irradiation region
- blanking signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To make measurement under no influence of a noise by intermittently emitting an electron beam modulated by a blanking signal and then by extracting only the same frequency component as the blanking signal from the output of an electron beam detector by using a frequency analyzer.
CONSTITUTION: To measure the current density distribution of electron-beam irradiation region 15, movable table 6 is driven first according to the program of information processor 11 to move detection part 5 into the irradiation region of electron beam 12 and deflection unit 4 is used to shift irradiation region 15 according to the steps sectioned in the direction of XY2. The order of this displacement allows the expansion or contraction of each unit section with the displacement in the direction of XY2 and the output of detector 5 at each position is processed by frequency analyzer 10 to extract only the amplitude value of the same frequency component as the blanking signal. Then, the extracted component amplitude value is processed to obtain the variation in beam current of each unit section, thereby forming the two-dimensional electron-beam current density distribution.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8669978A JPS584993B2 (en) | 1978-07-18 | 1978-07-18 | Electron beam current density distribution measurement method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8669978A JPS584993B2 (en) | 1978-07-18 | 1978-07-18 | Electron beam current density distribution measurement method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5513874A true JPS5513874A (en) | 1980-01-31 |
JPS584993B2 JPS584993B2 (en) | 1983-01-28 |
Family
ID=13894185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8669978A Expired JPS584993B2 (en) | 1978-07-18 | 1978-07-18 | Electron beam current density distribution measurement method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS584993B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4685349A (en) * | 1985-12-20 | 1987-08-11 | Agency Of Industrial Science And Technology | Flexibly foldable arm |
JPS62234323A (en) * | 1986-04-04 | 1987-10-14 | Jeol Ltd | Measuring method for distribution of current density of charged beam |
CN103376460A (en) * | 2012-04-28 | 2013-10-30 | 中国科学院电子学研究所 | Electron beam section measuring system of high-current electron beam analysis meter |
CN103376349A (en) * | 2012-04-28 | 2013-10-30 | 中国科学院电子学研究所 | Transversely-arranged high-current electron beam cross section three-dimensional scanning measurement system |
JP2015216278A (en) * | 2014-05-12 | 2015-12-03 | 株式会社ニューフレアテクノロジー | Charged particle beam lithography apparatus and dosage abnormality detection method of charged particle beams |
-
1978
- 1978-07-18 JP JP8669978A patent/JPS584993B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4685349A (en) * | 1985-12-20 | 1987-08-11 | Agency Of Industrial Science And Technology | Flexibly foldable arm |
JPS62234323A (en) * | 1986-04-04 | 1987-10-14 | Jeol Ltd | Measuring method for distribution of current density of charged beam |
CN103376460A (en) * | 2012-04-28 | 2013-10-30 | 中国科学院电子学研究所 | Electron beam section measuring system of high-current electron beam analysis meter |
CN103376349A (en) * | 2012-04-28 | 2013-10-30 | 中国科学院电子学研究所 | Transversely-arranged high-current electron beam cross section three-dimensional scanning measurement system |
JP2015216278A (en) * | 2014-05-12 | 2015-12-03 | 株式会社ニューフレアテクノロジー | Charged particle beam lithography apparatus and dosage abnormality detection method of charged particle beams |
Also Published As
Publication number | Publication date |
---|---|
JPS584993B2 (en) | 1983-01-28 |
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