JPS5513874A - Measuring method for distribution of electron beam current density - Google Patents

Measuring method for distribution of electron beam current density

Info

Publication number
JPS5513874A
JPS5513874A JP8669978A JP8669978A JPS5513874A JP S5513874 A JPS5513874 A JP S5513874A JP 8669978 A JP8669978 A JP 8669978A JP 8669978 A JP8669978 A JP 8669978A JP S5513874 A JPS5513874 A JP S5513874A
Authority
JP
Japan
Prior art keywords
electron beam
current density
electron
irradiation region
blanking signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8669978A
Other languages
Japanese (ja)
Other versions
JPS584993B2 (en
Inventor
Nobuo Shimazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8669978A priority Critical patent/JPS584993B2/en
Publication of JPS5513874A publication Critical patent/JPS5513874A/en
Publication of JPS584993B2 publication Critical patent/JPS584993B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To make measurement under no influence of a noise by intermittently emitting an electron beam modulated by a blanking signal and then by extracting only the same frequency component as the blanking signal from the output of an electron beam detector by using a frequency analyzer.
CONSTITUTION: To measure the current density distribution of electron-beam irradiation region 15, movable table 6 is driven first according to the program of information processor 11 to move detection part 5 into the irradiation region of electron beam 12 and deflection unit 4 is used to shift irradiation region 15 according to the steps sectioned in the direction of XY2. The order of this displacement allows the expansion or contraction of each unit section with the displacement in the direction of XY2 and the output of detector 5 at each position is processed by frequency analyzer 10 to extract only the amplitude value of the same frequency component as the blanking signal. Then, the extracted component amplitude value is processed to obtain the variation in beam current of each unit section, thereby forming the two-dimensional electron-beam current density distribution.
COPYRIGHT: (C)1980,JPO&Japio
JP8669978A 1978-07-18 1978-07-18 Electron beam current density distribution measurement method Expired JPS584993B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8669978A JPS584993B2 (en) 1978-07-18 1978-07-18 Electron beam current density distribution measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8669978A JPS584993B2 (en) 1978-07-18 1978-07-18 Electron beam current density distribution measurement method

Publications (2)

Publication Number Publication Date
JPS5513874A true JPS5513874A (en) 1980-01-31
JPS584993B2 JPS584993B2 (en) 1983-01-28

Family

ID=13894185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8669978A Expired JPS584993B2 (en) 1978-07-18 1978-07-18 Electron beam current density distribution measurement method

Country Status (1)

Country Link
JP (1) JPS584993B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685349A (en) * 1985-12-20 1987-08-11 Agency Of Industrial Science And Technology Flexibly foldable arm
JPS62234323A (en) * 1986-04-04 1987-10-14 Jeol Ltd Measuring method for distribution of current density of charged beam
CN103376460A (en) * 2012-04-28 2013-10-30 中国科学院电子学研究所 Electron beam section measuring system of high-current electron beam analysis meter
CN103376349A (en) * 2012-04-28 2013-10-30 中国科学院电子学研究所 Transversely-arranged high-current electron beam cross section three-dimensional scanning measurement system
JP2015216278A (en) * 2014-05-12 2015-12-03 株式会社ニューフレアテクノロジー Charged particle beam lithography apparatus and dosage abnormality detection method of charged particle beams

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685349A (en) * 1985-12-20 1987-08-11 Agency Of Industrial Science And Technology Flexibly foldable arm
JPS62234323A (en) * 1986-04-04 1987-10-14 Jeol Ltd Measuring method for distribution of current density of charged beam
CN103376460A (en) * 2012-04-28 2013-10-30 中国科学院电子学研究所 Electron beam section measuring system of high-current electron beam analysis meter
CN103376349A (en) * 2012-04-28 2013-10-30 中国科学院电子学研究所 Transversely-arranged high-current electron beam cross section three-dimensional scanning measurement system
JP2015216278A (en) * 2014-05-12 2015-12-03 株式会社ニューフレアテクノロジー Charged particle beam lithography apparatus and dosage abnormality detection method of charged particle beams

Also Published As

Publication number Publication date
JPS584993B2 (en) 1983-01-28

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