JPS5671964A - Semiconductor resistor - Google Patents
Semiconductor resistorInfo
- Publication number
- JPS5671964A JPS5671964A JP14897879A JP14897879A JPS5671964A JP S5671964 A JPS5671964 A JP S5671964A JP 14897879 A JP14897879 A JP 14897879A JP 14897879 A JP14897879 A JP 14897879A JP S5671964 A JPS5671964 A JP S5671964A
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- semiconductor resistor
- film
- layer
- leakage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/8605—Resistors with PN junctions
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14897879A JPS5671964A (en) | 1979-11-19 | 1979-11-19 | Semiconductor resistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14897879A JPS5671964A (en) | 1979-11-19 | 1979-11-19 | Semiconductor resistor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5671964A true JPS5671964A (en) | 1981-06-15 |
Family
ID=15464932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14897879A Pending JPS5671964A (en) | 1979-11-19 | 1979-11-19 | Semiconductor resistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5671964A (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4826478A (ja) * | 1971-08-11 | 1973-04-07 | ||
| JPS5260083A (en) * | 1975-11-12 | 1977-05-18 | Mitsubishi Electric Corp | Production of semiconductor device |
-
1979
- 1979-11-19 JP JP14897879A patent/JPS5671964A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4826478A (ja) * | 1971-08-11 | 1973-04-07 | ||
| JPS5260083A (en) * | 1975-11-12 | 1977-05-18 | Mitsubishi Electric Corp | Production of semiconductor device |
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