JPS51120684A - Semicondactor resistance element - Google Patents

Semicondactor resistance element

Info

Publication number
JPS51120684A
JPS51120684A JP4532875A JP4532875A JPS51120684A JP S51120684 A JPS51120684 A JP S51120684A JP 4532875 A JP4532875 A JP 4532875A JP 4532875 A JP4532875 A JP 4532875A JP S51120684 A JPS51120684 A JP S51120684A
Authority
JP
Japan
Prior art keywords
resistance element
semiconductor
semicondactor
crosswisely
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4532875A
Other languages
Japanese (ja)
Inventor
Yutaka Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4532875A priority Critical patent/JPS51120684A/en
Publication of JPS51120684A publication Critical patent/JPS51120684A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/8605—Resistors with PN junctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:In a resistance element employing the semiconductor on the insulating film formed on the semiconductor as an etching and diffusion mask, and the use of the thin impurities-diffusion region diffused crosswisely from the semiconductor permit a small-size high resistance of increased control.
JP4532875A 1975-04-16 1975-04-16 Semicondactor resistance element Pending JPS51120684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4532875A JPS51120684A (en) 1975-04-16 1975-04-16 Semicondactor resistance element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4532875A JPS51120684A (en) 1975-04-16 1975-04-16 Semicondactor resistance element

Publications (1)

Publication Number Publication Date
JPS51120684A true JPS51120684A (en) 1976-10-22

Family

ID=12716234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4532875A Pending JPS51120684A (en) 1975-04-16 1975-04-16 Semicondactor resistance element

Country Status (1)

Country Link
JP (1) JPS51120684A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105369A (en) * 1982-12-07 1984-06-18 Seiko Epson Corp Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107881A (en) * 1974-01-29 1975-08-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107881A (en) * 1974-01-29 1975-08-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105369A (en) * 1982-12-07 1984-06-18 Seiko Epson Corp Semiconductor device

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