JPS52131481A - Manufactuer fo semiconductor device - Google Patents

Manufactuer fo semiconductor device

Info

Publication number
JPS52131481A
JPS52131481A JP4772576A JP4772576A JPS52131481A JP S52131481 A JPS52131481 A JP S52131481A JP 4772576 A JP4772576 A JP 4772576A JP 4772576 A JP4772576 A JP 4772576A JP S52131481 A JPS52131481 A JP S52131481A
Authority
JP
Japan
Prior art keywords
manufactuer
semiconductor device
diffusion
preserve
utilizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4772576A
Other languages
Japanese (ja)
Inventor
Heiji Moroshima
Tsunao Tsukikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4772576A priority Critical patent/JPS52131481A/en
Publication of JPS52131481A publication Critical patent/JPS52131481A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To control the diffusion width to an extremely small value and to preserve the voltage resistance by utilizing the side etching of the diffusion mask partially. Thus, a variable capacity element featuring a large capacity variation ratio can be obtained.
COPYRIGHT: (C)1977,JPO&Japio
JP4772576A 1976-04-28 1976-04-28 Manufactuer fo semiconductor device Pending JPS52131481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4772576A JPS52131481A (en) 1976-04-28 1976-04-28 Manufactuer fo semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4772576A JPS52131481A (en) 1976-04-28 1976-04-28 Manufactuer fo semiconductor device

Publications (1)

Publication Number Publication Date
JPS52131481A true JPS52131481A (en) 1977-11-04

Family

ID=12783295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4772576A Pending JPS52131481A (en) 1976-04-28 1976-04-28 Manufactuer fo semiconductor device

Country Status (1)

Country Link
JP (1) JPS52131481A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893324A (en) * 1981-11-30 1983-06-03 Nec Corp Semiconductive device
JPS6318679A (en) * 1986-07-11 1988-01-26 Nec Corp Manufacture of varactor diode

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4826480A (en) * 1971-08-11 1973-04-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4826480A (en) * 1971-08-11 1973-04-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893324A (en) * 1981-11-30 1983-06-03 Nec Corp Semiconductive device
JPS6318679A (en) * 1986-07-11 1988-01-26 Nec Corp Manufacture of varactor diode

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