JPS52131481A - Manufactuer fo semiconductor device - Google Patents
Manufactuer fo semiconductor deviceInfo
- Publication number
- JPS52131481A JPS52131481A JP4772576A JP4772576A JPS52131481A JP S52131481 A JPS52131481 A JP S52131481A JP 4772576 A JP4772576 A JP 4772576A JP 4772576 A JP4772576 A JP 4772576A JP S52131481 A JPS52131481 A JP S52131481A
- Authority
- JP
- Japan
- Prior art keywords
- manufactuer
- semiconductor device
- diffusion
- preserve
- utilizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To control the diffusion width to an extremely small value and to preserve the voltage resistance by utilizing the side etching of the diffusion mask partially. Thus, a variable capacity element featuring a large capacity variation ratio can be obtained.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4772576A JPS52131481A (en) | 1976-04-28 | 1976-04-28 | Manufactuer fo semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4772576A JPS52131481A (en) | 1976-04-28 | 1976-04-28 | Manufactuer fo semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52131481A true JPS52131481A (en) | 1977-11-04 |
Family
ID=12783295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4772576A Pending JPS52131481A (en) | 1976-04-28 | 1976-04-28 | Manufactuer fo semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52131481A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5893324A (en) * | 1981-11-30 | 1983-06-03 | Nec Corp | Semiconductive device |
JPS6318679A (en) * | 1986-07-11 | 1988-01-26 | Nec Corp | Manufacture of varactor diode |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4826480A (en) * | 1971-08-11 | 1973-04-07 |
-
1976
- 1976-04-28 JP JP4772576A patent/JPS52131481A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4826480A (en) * | 1971-08-11 | 1973-04-07 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5893324A (en) * | 1981-11-30 | 1983-06-03 | Nec Corp | Semiconductive device |
JPS6318679A (en) * | 1986-07-11 | 1988-01-26 | Nec Corp | Manufacture of varactor diode |
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