Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP13810175ApriorityCriticalpatent/JPS5263072A/en
Publication of JPS5263072ApublicationCriticalpatent/JPS5263072A/en
PURPOSE: To produce a mesa type high-dielectric-strength semiconductor element by making the central portion of a high resistance layer thinner than its peripheral portions and providing channels in this portion.
COPYRIGHT: (C)1977,JPO&Japio
JP13810175A1975-11-191975-11-19Mesa type semiconductor device
PendingJPS5263072A
(en)