JPS5648146A - Inspection of semiconductor device and device therefor - Google Patents

Inspection of semiconductor device and device therefor

Info

Publication number
JPS5648146A
JPS5648146A JP12410979A JP12410979A JPS5648146A JP S5648146 A JPS5648146 A JP S5648146A JP 12410979 A JP12410979 A JP 12410979A JP 12410979 A JP12410979 A JP 12410979A JP S5648146 A JPS5648146 A JP S5648146A
Authority
JP
Japan
Prior art keywords
alpha
ray
chip
moderator
ray source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12410979A
Other languages
Japanese (ja)
Inventor
Naotake Motoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12410979A priority Critical patent/JPS5648146A/en
Publication of JPS5648146A publication Critical patent/JPS5648146A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To simply measure alpha-ray energy dependence on misoperation by installing a moderator film on an alpha-ray path located between an alpha-ray source and a semiconductor chip wherein the thickness, the number and the quality of films are selected. CONSTITUTION:The inside of a bell jar 10 forms vacuum exhaustion. A tested semiconductor chip 13A is held 13 under an alpha-ray source 12 by reserving a distance L and an alpha-ray detection element 14 is stationed at nearly same plane level. Holders 15 are provided at the alpha-ray path located between the alpha-ray source and the chip 13A to hold a moderator film with free removability. The thickness, the number and the quality of films are properly changed. Right or error is judged 16 by driving circuit elements in the chip 13A while measuring 17 the intensity of alpha-ray energy to the surface of the chip. In this composition, the intensity of the alpha-ray energy will be changed by a simple and practical method.
JP12410979A 1979-09-28 1979-09-28 Inspection of semiconductor device and device therefor Pending JPS5648146A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12410979A JPS5648146A (en) 1979-09-28 1979-09-28 Inspection of semiconductor device and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12410979A JPS5648146A (en) 1979-09-28 1979-09-28 Inspection of semiconductor device and device therefor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP21250085A Division JPS61111555A (en) 1985-09-27 1985-09-27 Inspection equipment for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5648146A true JPS5648146A (en) 1981-05-01

Family

ID=14877134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12410979A Pending JPS5648146A (en) 1979-09-28 1979-09-28 Inspection of semiconductor device and device therefor

Country Status (1)

Country Link
JP (1) JPS5648146A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142473A (en) * 1984-12-17 1986-06-30 Hitachi Ltd Tester for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142473A (en) * 1984-12-17 1986-06-30 Hitachi Ltd Tester for semiconductor device

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