JPS5392672A - Analyzing method for defect of semiconductor element - Google Patents

Analyzing method for defect of semiconductor element

Info

Publication number
JPS5392672A
JPS5392672A JP713477A JP713477A JPS5392672A JP S5392672 A JPS5392672 A JP S5392672A JP 713477 A JP713477 A JP 713477A JP 713477 A JP713477 A JP 713477A JP S5392672 A JPS5392672 A JP S5392672A
Authority
JP
Japan
Prior art keywords
defect
semiconductor element
analyzing method
radiating
laminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP713477A
Other languages
Japanese (ja)
Other versions
JPS5921169B2 (en
Inventor
Sunao Nishioka
Hirozo Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP713477A priority Critical patent/JPS5921169B2/en
Publication of JPS5392672A publication Critical patent/JPS5392672A/en
Publication of JPS5921169B2 publication Critical patent/JPS5921169B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To perform the analysis of the defect for the semiconductor element through observation using the photo detector, by laminating the field effect type liquid crystal film and the glass plate on the exposed substrate surface at the PN junction and radiating the deflected light.
COPYRIGHT: (C)1978,JPO&Japio
JP713477A 1977-01-24 1977-01-24 Failure analysis method for semiconductor devices Expired JPS5921169B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP713477A JPS5921169B2 (en) 1977-01-24 1977-01-24 Failure analysis method for semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP713477A JPS5921169B2 (en) 1977-01-24 1977-01-24 Failure analysis method for semiconductor devices

Publications (2)

Publication Number Publication Date
JPS5392672A true JPS5392672A (en) 1978-08-14
JPS5921169B2 JPS5921169B2 (en) 1984-05-18

Family

ID=11657598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP713477A Expired JPS5921169B2 (en) 1977-01-24 1977-01-24 Failure analysis method for semiconductor devices

Country Status (1)

Country Link
JP (1) JPS5921169B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6342498U (en) * 1986-09-05 1988-03-19
JPS6385597U (en) * 1986-11-26 1988-06-04
JPH0219971U (en) * 1988-07-15 1990-02-09

Also Published As

Publication number Publication date
JPS5921169B2 (en) 1984-05-18

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