JPS5392672A - Analyzing method for defect of semiconductor element - Google Patents
Analyzing method for defect of semiconductor elementInfo
- Publication number
- JPS5392672A JPS5392672A JP713477A JP713477A JPS5392672A JP S5392672 A JPS5392672 A JP S5392672A JP 713477 A JP713477 A JP 713477A JP 713477 A JP713477 A JP 713477A JP S5392672 A JPS5392672 A JP S5392672A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- semiconductor element
- analyzing method
- radiating
- laminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To perform the analysis of the defect for the semiconductor element through observation using the photo detector, by laminating the field effect type liquid crystal film and the glass plate on the exposed substrate surface at the PN junction and radiating the deflected light.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP713477A JPS5921169B2 (en) | 1977-01-24 | 1977-01-24 | Failure analysis method for semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP713477A JPS5921169B2 (en) | 1977-01-24 | 1977-01-24 | Failure analysis method for semiconductor devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5392672A true JPS5392672A (en) | 1978-08-14 |
JPS5921169B2 JPS5921169B2 (en) | 1984-05-18 |
Family
ID=11657598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP713477A Expired JPS5921169B2 (en) | 1977-01-24 | 1977-01-24 | Failure analysis method for semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5921169B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6342498U (en) * | 1986-09-05 | 1988-03-19 | ||
JPS6385597U (en) * | 1986-11-26 | 1988-06-04 | ||
JPH0219971U (en) * | 1988-07-15 | 1990-02-09 |
-
1977
- 1977-01-24 JP JP713477A patent/JPS5921169B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5921169B2 (en) | 1984-05-18 |
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