JPS5411681A - Analysis method of defective semiconductor elements - Google Patents

Analysis method of defective semiconductor elements

Info

Publication number
JPS5411681A
JPS5411681A JP7673877A JP7673877A JPS5411681A JP S5411681 A JPS5411681 A JP S5411681A JP 7673877 A JP7673877 A JP 7673877A JP 7673877 A JP7673877 A JP 7673877A JP S5411681 A JPS5411681 A JP S5411681A
Authority
JP
Japan
Prior art keywords
analysis method
semiconductor elements
defective semiconductor
defective
jmajor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7673877A
Other languages
Japanese (ja)
Inventor
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7673877A priority Critical patent/JPS5411681A/en
Publication of JPS5411681A publication Critical patent/JPS5411681A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To analyze the defective elements, by observing the liquid crystal film on the element jmajor plane, through the use of optical fiber bundle in place of conventional glass plate.
COPYRIGHT: (C)1979,JPO&Japio
JP7673877A 1977-06-27 1977-06-27 Analysis method of defective semiconductor elements Pending JPS5411681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7673877A JPS5411681A (en) 1977-06-27 1977-06-27 Analysis method of defective semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7673877A JPS5411681A (en) 1977-06-27 1977-06-27 Analysis method of defective semiconductor elements

Publications (1)

Publication Number Publication Date
JPS5411681A true JPS5411681A (en) 1979-01-27

Family

ID=13613929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7673877A Pending JPS5411681A (en) 1977-06-27 1977-06-27 Analysis method of defective semiconductor elements

Country Status (1)

Country Link
JP (1) JPS5411681A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724034A (en) * 1980-07-18 1982-02-08 Eiki Kogyo Kk Multitrack optical sound recording film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724034A (en) * 1980-07-18 1982-02-08 Eiki Kogyo Kk Multitrack optical sound recording film

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