JPS5372468A - Semiconductor element analyzer - Google Patents

Semiconductor element analyzer

Info

Publication number
JPS5372468A
JPS5372468A JP14823576A JP14823576A JPS5372468A JP S5372468 A JPS5372468 A JP S5372468A JP 14823576 A JP14823576 A JP 14823576A JP 14823576 A JP14823576 A JP 14823576A JP S5372468 A JPS5372468 A JP S5372468A
Authority
JP
Japan
Prior art keywords
semiconductor element
element analyzer
observing
observe
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14823576A
Other languages
Japanese (ja)
Other versions
JPS5933261B2 (en
Inventor
Shuji Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14823576A priority Critical patent/JPS5933261B2/en
Publication of JPS5372468A publication Critical patent/JPS5372468A/en
Publication of JPS5933261B2 publication Critical patent/JPS5933261B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To observe the semiconductor element by placing the test piece through the provision of the tilt surface of a constant angle at the edge of the main axis possible for sliding only to up and down direction, and by exposing the pn junction through the polishing of element while observing with a microscope through a transparent polish plate.
COPYRIGHT: (C)1978,JPO&Japio
JP14823576A 1976-12-08 1976-12-08 Semiconductor device analysis equipment Expired JPS5933261B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14823576A JPS5933261B2 (en) 1976-12-08 1976-12-08 Semiconductor device analysis equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14823576A JPS5933261B2 (en) 1976-12-08 1976-12-08 Semiconductor device analysis equipment

Publications (2)

Publication Number Publication Date
JPS5372468A true JPS5372468A (en) 1978-06-27
JPS5933261B2 JPS5933261B2 (en) 1984-08-14

Family

ID=15448267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14823576A Expired JPS5933261B2 (en) 1976-12-08 1976-12-08 Semiconductor device analysis equipment

Country Status (1)

Country Link
JP (1) JPS5933261B2 (en)

Also Published As

Publication number Publication date
JPS5933261B2 (en) 1984-08-14

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