JPS5372468A - Semiconductor element analyzer - Google Patents
Semiconductor element analyzerInfo
- Publication number
- JPS5372468A JPS5372468A JP14823576A JP14823576A JPS5372468A JP S5372468 A JPS5372468 A JP S5372468A JP 14823576 A JP14823576 A JP 14823576A JP 14823576 A JP14823576 A JP 14823576A JP S5372468 A JPS5372468 A JP S5372468A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- element analyzer
- observing
- observe
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To observe the semiconductor element by placing the test piece through the provision of the tilt surface of a constant angle at the edge of the main axis possible for sliding only to up and down direction, and by exposing the pn junction through the polishing of element while observing with a microscope through a transparent polish plate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14823576A JPS5933261B2 (en) | 1976-12-08 | 1976-12-08 | Semiconductor device analysis equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14823576A JPS5933261B2 (en) | 1976-12-08 | 1976-12-08 | Semiconductor device analysis equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5372468A true JPS5372468A (en) | 1978-06-27 |
JPS5933261B2 JPS5933261B2 (en) | 1984-08-14 |
Family
ID=15448267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14823576A Expired JPS5933261B2 (en) | 1976-12-08 | 1976-12-08 | Semiconductor device analysis equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5933261B2 (en) |
-
1976
- 1976-12-08 JP JP14823576A patent/JPS5933261B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5933261B2 (en) | 1984-08-14 |
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