JPS5451385A - Inspector of semiconductor device - Google Patents

Inspector of semiconductor device

Info

Publication number
JPS5451385A
JPS5451385A JP11761577A JP11761577A JPS5451385A JP S5451385 A JPS5451385 A JP S5451385A JP 11761577 A JP11761577 A JP 11761577A JP 11761577 A JP11761577 A JP 11761577A JP S5451385 A JPS5451385 A JP S5451385A
Authority
JP
Japan
Prior art keywords
semiconductor devices
laser light
semiconductor
rest
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11761577A
Other languages
Japanese (ja)
Inventor
Michio Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11761577A priority Critical patent/JPS5451385A/en
Publication of JPS5451385A publication Critical patent/JPS5451385A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To obtain an inspector which does not affect the characteristics of semiconductor devices, permits the regeneration of the marked semiconductor devices and is provided with marking means for easy identification of non-defectives and defectives at the time of sorting.
CONSTITUTION: A measuring probe 1 is applied to the chip 2 of the semiconductor devices created in the surface of the semiconductor wafer 3 to be inspected, and the goodness or not of the semiconductor devices is judged with a measuring apparatus 8. The semiconductor wafer 3 is secured to a transparent self-adhesive sheet 4, which is vacuum sucked onto the transparent rest face 5 of the rest base 9 of the prober. When the device is judged to be defective as a result of measurement, a signal is sent from the measuring apparatus 8 to the laser light source 7 in the rest base, by which laser light is emitted. This laser light passes through a lens 6 then through the rest face 5, self-adhesive sheet 4 and fuses the back of the defective semiconductor chip of the wafer 3, whereby marking is put
COPYRIGHT: (C)1979,JPO&Japio
JP11761577A 1977-09-29 1977-09-29 Inspector of semiconductor device Pending JPS5451385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11761577A JPS5451385A (en) 1977-09-29 1977-09-29 Inspector of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11761577A JPS5451385A (en) 1977-09-29 1977-09-29 Inspector of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5451385A true JPS5451385A (en) 1979-04-23

Family

ID=14716130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11761577A Pending JPS5451385A (en) 1977-09-29 1977-09-29 Inspector of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5451385A (en)

Similar Documents

Publication Publication Date Title
JPS5757246A (en) Detecting and measuring apparatus for flaw
SE8104384L (en) PROCEDURE AND DEVICE FOR THE DETECTION OF CONTAMINATING PARTICLES ON A MATERIAL
DE3375982D1 (en) Photomultiplier tube assembly
ES8308638A1 (en) Surface inspection scanning system and method.
JPS57147247A (en) Automatic inspecting device for semiconductor chip
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
JPS5451385A (en) Inspector of semiconductor device
JPS5355983A (en) Automatic micro defect detector
US4572886A (en) Optical method for integrated circuit bar identification
ATE127919T1 (en) METHOD FOR DIFFUSE ILLUMINATION OF A MEASURING SURFACE IN A TEST CARRIER ANALYZER.
JPS5760243A (en) Measuring apparatus for fresnel lens
ATE45216T1 (en) DEVICE WITH MEASUREMENT CIRCUIT.
JPS643545A (en) Method and apparatus for inspection
ATE17531T1 (en) DEVICE FOR THE AUTOMATIC RECOGNITION AND EVALUATION OF THE CHARACTERISTICS OF PRINTED WRITINGS.
JPS6034856A (en) Marking apparatus
ES406936A1 (en) Method and apparatus for measuring optical irregularities in an article
JPS6421936A (en) Inspection of semiconductor integrated circuit
JPS54685A (en) Simultaneously measurement of florescent x ray and diffracted x ray of minute area
JPS54112174A (en) Testing method for semiconductor device
JPS5681454A (en) Probe card
JPS5648146A (en) Inspection of semiconductor device and device therefor
US2020548A (en) Testing apparatus for surface finish
JPS57128042A (en) Inspecting method for semiconductor device
GB1326343A (en) Calibrating device for apparatus for determining cleanness of air in a controlled environment
JPS54162475A (en) Inspection unit for semiconductor device