JPS5451385A - Inspector of semiconductor device - Google Patents
Inspector of semiconductor deviceInfo
- Publication number
- JPS5451385A JPS5451385A JP11761577A JP11761577A JPS5451385A JP S5451385 A JPS5451385 A JP S5451385A JP 11761577 A JP11761577 A JP 11761577A JP 11761577 A JP11761577 A JP 11761577A JP S5451385 A JPS5451385 A JP S5451385A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor devices
- laser light
- semiconductor
- rest
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE: To obtain an inspector which does not affect the characteristics of semiconductor devices, permits the regeneration of the marked semiconductor devices and is provided with marking means for easy identification of non-defectives and defectives at the time of sorting.
CONSTITUTION: A measuring probe 1 is applied to the chip 2 of the semiconductor devices created in the surface of the semiconductor wafer 3 to be inspected, and the goodness or not of the semiconductor devices is judged with a measuring apparatus 8. The semiconductor wafer 3 is secured to a transparent self-adhesive sheet 4, which is vacuum sucked onto the transparent rest face 5 of the rest base 9 of the prober. When the device is judged to be defective as a result of measurement, a signal is sent from the measuring apparatus 8 to the laser light source 7 in the rest base, by which laser light is emitted. This laser light passes through a lens 6 then through the rest face 5, self-adhesive sheet 4 and fuses the back of the defective semiconductor chip of the wafer 3, whereby marking is put
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11761577A JPS5451385A (en) | 1977-09-29 | 1977-09-29 | Inspector of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11761577A JPS5451385A (en) | 1977-09-29 | 1977-09-29 | Inspector of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5451385A true JPS5451385A (en) | 1979-04-23 |
Family
ID=14716130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11761577A Pending JPS5451385A (en) | 1977-09-29 | 1977-09-29 | Inspector of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5451385A (en) |
-
1977
- 1977-09-29 JP JP11761577A patent/JPS5451385A/en active Pending
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