JPS55122171A - Method of testing semiconductor unit - Google Patents
Method of testing semiconductor unitInfo
- Publication number
- JPS55122171A JPS55122171A JP2970079A JP2970079A JPS55122171A JP S55122171 A JPS55122171 A JP S55122171A JP 2970079 A JP2970079 A JP 2970079A JP 2970079 A JP2970079 A JP 2970079A JP S55122171 A JPS55122171 A JP S55122171A
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode terminal
- produced
- photoresist
- semiconductor unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE: To avoid the adverse effect of irradiated light in measurement, by coating an Al film except on the electrode terminal face of a semiconductor unit produced on the surface of a semiconductor substrate by a photoresist method, and thereafter bringing a measuring probe into contact with the electrode terminal.
CONSTITUTION: A phosphosilicate glass film 7 is produced except on one electrode terminal 2 of a semiconductor unit 1 manufactured on a semiconductor substrate of a tested body. A photoresist film 8 is selectively provided on the film 7. An Al film 9 is produced on the entire surface of the film 8. The photoresist film 8 is thereafter removed by a lifting-off method. At the same time, the Al layer on the film 8 is also removed. As a result, the surface of the electrode terminal 2 is exposed. A second photoresist layer 10 having an opening on the surface of the electrode terminal is produced. The semiconductor unit is thus treated. A measuring probe 4 is brought into contact with the electrode terminal 2 to test the electric properties of the unit 1.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2970079A JPS55122171A (en) | 1979-03-14 | 1979-03-14 | Method of testing semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2970079A JPS55122171A (en) | 1979-03-14 | 1979-03-14 | Method of testing semiconductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55122171A true JPS55122171A (en) | 1980-09-19 |
Family
ID=12283382
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2970079A Pending JPS55122171A (en) | 1979-03-14 | 1979-03-14 | Method of testing semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55122171A (en) |
-
1979
- 1979-03-14 JP JP2970079A patent/JPS55122171A/en active Pending
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