JPS6424436A - Prober device - Google Patents
Prober deviceInfo
- Publication number
- JPS6424436A JPS6424436A JP17996487A JP17996487A JPS6424436A JP S6424436 A JPS6424436 A JP S6424436A JP 17996487 A JP17996487 A JP 17996487A JP 17996487 A JP17996487 A JP 17996487A JP S6424436 A JPS6424436 A JP S6424436A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- semiconductor wafer
- drying
- probe
- drying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To contrive accomplishment of manpower saving and shortening of a lead time by a method wherein an independently conducting drying process for drying ink is excluded and a drying device is unnecessitated by having a built-in drying device in a prober device. CONSTITUTION:A drying device 6, constituted by burying a heater 8 in a plate 7, is built-in in a prober device 1. On the drying device 6, ink 5 is dried up by placing an ink-adhered semiconductor wafer 4 on the upper surface of the plate 7. To be more precise, the semiconductor wafer 4 is placed on the upper surface of the stage 2 to be used for measurement, a probe testing of said circuit is conducted. Then, the result of said test is marked by the ink 5 on the surface of the semiconductor wafer 4. After said probe test has been finished, the semiconductor wafer, on which ink 5 is marked, is placed on the upper surface of the drying device 6 which is built-in in the probe device 1, and the ink 5 is dried up. Then, the ink 5 has been dried up, the semiconductor wafer 4 is housed in the housing case 3 of the probe device 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17996487A JPS6424436A (en) | 1987-07-21 | 1987-07-21 | Prober device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17996487A JPS6424436A (en) | 1987-07-21 | 1987-07-21 | Prober device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6424436A true JPS6424436A (en) | 1989-01-26 |
Family
ID=16075053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17996487A Pending JPS6424436A (en) | 1987-07-21 | 1987-07-21 | Prober device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6424436A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01157544A (en) * | 1987-09-02 | 1989-06-20 | Tokyo Electron Ltd | Probing apparatus |
-
1987
- 1987-07-21 JP JP17996487A patent/JPS6424436A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01157544A (en) * | 1987-09-02 | 1989-06-20 | Tokyo Electron Ltd | Probing apparatus |
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