JPS5563835A - Defect detector for insulation film - Google Patents
Defect detector for insulation filmInfo
- Publication number
- JPS5563835A JPS5563835A JP13704878A JP13704878A JPS5563835A JP S5563835 A JPS5563835 A JP S5563835A JP 13704878 A JP13704878 A JP 13704878A JP 13704878 A JP13704878 A JP 13704878A JP S5563835 A JPS5563835 A JP S5563835A
- Authority
- JP
- Japan
- Prior art keywords
- film
- liquid crystal
- insulation film
- checked
- insulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To detect defects in an insulation film, by use of liquid crystal, by employing a spacer having a conductive film on one side which contacts the insulation film to be checked and sensing the potential difference between the conductive film and a semiconductor substrate under the condition wherein applied voltage is strictly controlled.
CONSTITUTION: A semiconductor 3, on which an insulation film 2 to be tested is formed, is mounted on a metallic test stand 1, and an insulating spacer 6 having a large aperture 4 and provided with a conductive film 5 of Au and the like is mounted thereon in such a manner that the side of the film 5 is in touch with the film 2. After the aperture 4 is charged with liquid crystal, a glass having a transparent electrode 8 is mounted thereon. A d-c powder source 10 is connected to the electrode 8 and the stand 1, and the insulation failure is checked while observing the dynamic scattering of liquid crystal under a microscope. Observation will be performed after the potential difference between the film 5 and the substrate 3 is set to a predetermined value by adjusting the d-c powder source 10 while reading the indication of a voltmeter 11. In such arrangement, the defects can be checked accurately since the value of voltage used for checking can be appropriately defined.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13704878A JPS5856973B2 (en) | 1978-11-06 | 1978-11-06 | Insulating film defect detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13704878A JPS5856973B2 (en) | 1978-11-06 | 1978-11-06 | Insulating film defect detection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5563835A true JPS5563835A (en) | 1980-05-14 |
JPS5856973B2 JPS5856973B2 (en) | 1983-12-17 |
Family
ID=15189645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13704878A Expired JPS5856973B2 (en) | 1978-11-06 | 1978-11-06 | Insulating film defect detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5856973B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007263875A (en) * | 2006-03-29 | 2007-10-11 | Ngk Insulators Ltd | Plasma generation electrode inspection device |
JP2008241383A (en) * | 2007-03-27 | 2008-10-09 | Yaskawa Electric Corp | Oil film dielectric breakdown evaluation device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6076495U (en) * | 1983-10-29 | 1985-05-28 | カルソニックカンセイ株式会社 | Display drive circuit |
-
1978
- 1978-11-06 JP JP13704878A patent/JPS5856973B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007263875A (en) * | 2006-03-29 | 2007-10-11 | Ngk Insulators Ltd | Plasma generation electrode inspection device |
JP4699928B2 (en) * | 2006-03-29 | 2011-06-15 | 日本碍子株式会社 | Plasma generation electrode inspection device |
JP2008241383A (en) * | 2007-03-27 | 2008-10-09 | Yaskawa Electric Corp | Oil film dielectric breakdown evaluation device |
Also Published As
Publication number | Publication date |
---|---|
JPS5856973B2 (en) | 1983-12-17 |
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