JPS5637674A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5637674A JPS5637674A JP11379779A JP11379779A JPS5637674A JP S5637674 A JPS5637674 A JP S5637674A JP 11379779 A JP11379779 A JP 11379779A JP 11379779 A JP11379779 A JP 11379779A JP S5637674 A JPS5637674 A JP S5637674A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- trapezoidal shape
- region
- base
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 3
- 239000012535 impurity Substances 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/30—Devices controlled by electric currents or voltages
- H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H10D48/34—Bipolar devices
- H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11379779A JPS5637674A (en) | 1979-09-05 | 1979-09-05 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11379779A JPS5637674A (en) | 1979-09-05 | 1979-09-05 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5637674A true JPS5637674A (en) | 1981-04-11 |
| JPS6346583B2 JPS6346583B2 (enExample) | 1988-09-16 |
Family
ID=14621316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11379779A Granted JPS5637674A (en) | 1979-09-05 | 1979-09-05 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5637674A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01174963U (enExample) * | 1988-05-30 | 1989-12-13 | ||
| JPH03296222A (ja) * | 1990-04-13 | 1991-12-26 | Nec Corp | 半導体装置とその製造方法 |
-
1979
- 1979-09-05 JP JP11379779A patent/JPS5637674A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01174963U (enExample) * | 1988-05-30 | 1989-12-13 | ||
| JPH03296222A (ja) * | 1990-04-13 | 1991-12-26 | Nec Corp | 半導体装置とその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6346583B2 (enExample) | 1988-09-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0200525A3 (en) | Via in an integrated circuit and process for producing same | |
| JPS5637674A (en) | Manufacture of semiconductor device | |
| JPS57167659A (en) | Manufacture of semiconductor device | |
| JPS5669843A (en) | Manufacture of semiconductor device | |
| JPS6472567A (en) | Manufacture of semiconductor device | |
| JPS6459936A (en) | Manufacture of integrated circuit | |
| JPS5764927A (en) | Manufacture of semiconductor device | |
| JPS5568655A (en) | Manufacturing method of wiring | |
| JPS5662337A (en) | Production of wiring and electrode | |
| JPS56120155A (en) | Coil for semiconductor integrated circuit and its manufacture | |
| JPS5710249A (en) | Manufacture of semiconductor device | |
| JPS55118679A (en) | Manufacture of field effect transistor | |
| JPS5743418A (en) | Manufacture of semiconductor device | |
| JPS5732653A (en) | Manufacture of semiconductor device | |
| JPS5638825A (en) | Formation of insulating film | |
| JPS56120154A (en) | Coil and its manufacture | |
| JPS57176745A (en) | Manufacture of multilayer wiring | |
| JPS5667938A (en) | Semiconductor system | |
| JPS5690535A (en) | Production of integrated multilayer wiring strcuture | |
| JPS5785247A (en) | Formation of fetch electrode | |
| JPS55163862A (en) | Manufacture of semiconductor device | |
| JPS6412554A (en) | Manufacture of semiconductor device | |
| JPS57159021A (en) | Forming method of pattern | |
| JPS56130951A (en) | Manufacture of semiconductor device | |
| JPS57173970A (en) | Manufacture of semiconductor device |