JPS5618751A - Gas detector - Google Patents
Gas detectorInfo
- Publication number
- JPS5618751A JPS5618751A JP9363979A JP9363979A JPS5618751A JP S5618751 A JPS5618751 A JP S5618751A JP 9363979 A JP9363979 A JP 9363979A JP 9363979 A JP9363979 A JP 9363979A JP S5618751 A JPS5618751 A JP S5618751A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- substance
- constitution
- cavity
- heating units
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9363979A JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9363979A JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5618751A true JPS5618751A (en) | 1981-02-21 |
JPS6122899B2 JPS6122899B2 (enrdf_load_stackoverflow) | 1986-06-03 |
Family
ID=14087915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9363979A Granted JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5618751A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
JPS6295454A (ja) * | 1985-10-22 | 1987-05-01 | Nippon Telegr & Teleph Corp <Ntt> | マイクロガスセンサおよびその製造方法 |
JPH01299452A (ja) * | 1988-05-27 | 1989-12-04 | Ricoh Co Ltd | 4端子検出型ガス検出装置 |
US5165292A (en) * | 1985-12-09 | 1992-11-24 | Ottosensors Corporation | Channel Device and tube connection and their fabrication procedures |
-
1979
- 1979-07-25 JP JP9363979A patent/JPS5618751A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
JPS6295454A (ja) * | 1985-10-22 | 1987-05-01 | Nippon Telegr & Teleph Corp <Ntt> | マイクロガスセンサおよびその製造方法 |
US5165292A (en) * | 1985-12-09 | 1992-11-24 | Ottosensors Corporation | Channel Device and tube connection and their fabrication procedures |
JPH01299452A (ja) * | 1988-05-27 | 1989-12-04 | Ricoh Co Ltd | 4端子検出型ガス検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6122899B2 (enrdf_load_stackoverflow) | 1986-06-03 |
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