JPS56169343A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS56169343A JPS56169343A JP7225180A JP7225180A JPS56169343A JP S56169343 A JPS56169343 A JP S56169343A JP 7225180 A JP7225180 A JP 7225180A JP 7225180 A JP7225180 A JP 7225180A JP S56169343 A JPS56169343 A JP S56169343A
- Authority
- JP
- Japan
- Prior art keywords
- track
- wafer
- regions
- mechanisms
- treating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7225180A JPS56169343A (en) | 1980-05-30 | 1980-05-30 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7225180A JPS56169343A (en) | 1980-05-30 | 1980-05-30 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56169343A true JPS56169343A (en) | 1981-12-26 |
JPS6318855B2 JPS6318855B2 (ja) | 1988-04-20 |
Family
ID=13483882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7225180A Granted JPS56169343A (en) | 1980-05-30 | 1980-05-30 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56169343A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60115216A (ja) * | 1983-11-28 | 1985-06-21 | Hitachi Ltd | 真空処理方法及び装置 |
JPS60245236A (ja) * | 1984-05-21 | 1985-12-05 | Hitachi Ltd | 半導体製造装置 |
JPS61272936A (ja) * | 1985-05-28 | 1986-12-03 | Nec Corp | ウエハ処理装置 |
JPH01239914A (ja) * | 1988-03-22 | 1989-09-25 | Tokyo Electron Ltd | 枚葉処理装置 |
JPH0229527U (ja) * | 1988-08-17 | 1990-02-26 | ||
JPH0278243A (ja) * | 1988-09-14 | 1990-03-19 | Fujitsu Ltd | ウェーハの連続処理装置及び連続処理方法 |
US5536128A (en) * | 1988-10-21 | 1996-07-16 | Hitachi, Ltd. | Method and apparatus for carrying a variety of products |
CN110112086A (zh) * | 2019-05-30 | 2019-08-09 | 滕吉美 | 一种半导体片清洗设备 |
-
1980
- 1980-05-30 JP JP7225180A patent/JPS56169343A/ja active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60115216A (ja) * | 1983-11-28 | 1985-06-21 | Hitachi Ltd | 真空処理方法及び装置 |
JPS60245236A (ja) * | 1984-05-21 | 1985-12-05 | Hitachi Ltd | 半導体製造装置 |
JPS61272936A (ja) * | 1985-05-28 | 1986-12-03 | Nec Corp | ウエハ処理装置 |
JPH01239914A (ja) * | 1988-03-22 | 1989-09-25 | Tokyo Electron Ltd | 枚葉処理装置 |
JPH0229527U (ja) * | 1988-08-17 | 1990-02-26 | ||
JPH0278243A (ja) * | 1988-09-14 | 1990-03-19 | Fujitsu Ltd | ウェーハの連続処理装置及び連続処理方法 |
US5536128A (en) * | 1988-10-21 | 1996-07-16 | Hitachi, Ltd. | Method and apparatus for carrying a variety of products |
CN110112086A (zh) * | 2019-05-30 | 2019-08-09 | 滕吉美 | 一种半导体片清洗设备 |
Also Published As
Publication number | Publication date |
---|---|
JPS6318855B2 (ja) | 1988-04-20 |
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