CN110112086A - 一种半导体片清洗设备 - Google Patents
一种半导体片清洗设备 Download PDFInfo
- Publication number
- CN110112086A CN110112086A CN201910462634.1A CN201910462634A CN110112086A CN 110112086 A CN110112086 A CN 110112086A CN 201910462634 A CN201910462634 A CN 201910462634A CN 110112086 A CN110112086 A CN 110112086A
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- CN
- China
- Prior art keywords
- semiconductor chip
- chain
- blanking
- grasping
- cam ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 53
- 239000004065 semiconductor Substances 0.000 title claims abstract description 44
- 239000000463 material Substances 0.000 claims abstract description 39
- 230000001360 synchronised effect Effects 0.000 claims abstract description 6
- 238000009434 installation Methods 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 5
- 239000012141 concentrate Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (10)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010180329.6A CN111383966A (zh) | 2019-05-30 | 2019-05-30 | 一种半导体片清洗设备 |
CN201910462634.1A CN110112086B (zh) | 2019-05-30 | 2019-05-30 | 一种半导体片清洗设备 |
CN202010180262.6A CN111383977A (zh) | 2019-05-30 | 2019-05-30 | 一种自动化多工序的半导体片清洗设备 |
CN202010180330.9A CN111354663A (zh) | 2019-05-30 | 2019-05-30 | 半导体片清洗设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910462634.1A CN110112086B (zh) | 2019-05-30 | 2019-05-30 | 一种半导体片清洗设备 |
Related Child Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010180329.6A Division CN111383966A (zh) | 2019-05-30 | 2019-05-30 | 一种半导体片清洗设备 |
CN202010180262.6A Division CN111383977A (zh) | 2019-05-30 | 2019-05-30 | 一种自动化多工序的半导体片清洗设备 |
CN202010180330.9A Division CN111354663A (zh) | 2019-05-30 | 2019-05-30 | 半导体片清洗设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110112086A true CN110112086A (zh) | 2019-08-09 |
CN110112086B CN110112086B (zh) | 2020-04-07 |
Family
ID=67492996
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010180262.6A Withdrawn CN111383977A (zh) | 2019-05-30 | 2019-05-30 | 一种自动化多工序的半导体片清洗设备 |
CN201910462634.1A Active CN110112086B (zh) | 2019-05-30 | 2019-05-30 | 一种半导体片清洗设备 |
CN202010180330.9A Withdrawn CN111354663A (zh) | 2019-05-30 | 2019-05-30 | 半导体片清洗设备 |
CN202010180329.6A Withdrawn CN111383966A (zh) | 2019-05-30 | 2019-05-30 | 一种半导体片清洗设备 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010180262.6A Withdrawn CN111383977A (zh) | 2019-05-30 | 2019-05-30 | 一种自动化多工序的半导体片清洗设备 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010180330.9A Withdrawn CN111354663A (zh) | 2019-05-30 | 2019-05-30 | 半导体片清洗设备 |
CN202010180329.6A Withdrawn CN111383966A (zh) | 2019-05-30 | 2019-05-30 | 一种半导体片清洗设备 |
Country Status (1)
Country | Link |
---|---|
CN (4) | CN111383977A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110676197A (zh) * | 2019-10-12 | 2020-01-10 | 盐城矽润半导体有限公司 | 一种精密半导体清洗装置 |
CN111081612A (zh) * | 2020-01-11 | 2020-04-28 | 深圳市昌富祥智能科技有限公司 | 一种半导体环形装片一体机 |
CN111252469A (zh) * | 2020-01-16 | 2020-06-09 | 阜阳佰恩得新材料技术有限公司 | 一种大蒜自动上料加工设备 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56169343A (en) * | 1980-05-30 | 1981-12-26 | Fujitsu Ltd | Manufacture of semiconductor device |
CN101006833A (zh) * | 2006-01-06 | 2007-08-01 | 李卫红 | 全自动烹饪机器人系统 |
CN102161417A (zh) * | 2010-02-24 | 2011-08-24 | 村田自动化机械有限公司 | 输送车系统 |
CN102820246A (zh) * | 2011-06-09 | 2012-12-12 | 承澔科技股份有限公司 | 具有浮动导正机构的元件移载装置 |
CN103422143A (zh) * | 2013-08-01 | 2013-12-04 | 黄海 | 一种自动化电镀生产线 |
CN203530469U (zh) * | 2013-11-13 | 2014-04-09 | 深圳市美高塑胶金属制品有限公司 | 一种铜、镍、铬环形钓鱼式自动电镀加工系统 |
CN106469669A (zh) * | 2015-08-19 | 2017-03-01 | 三星显示有限公司 | 基板移送系统 |
CN106623173A (zh) * | 2016-10-17 | 2017-05-10 | 深圳市九利机械设备有限公司 | 一种电池清洗机 |
CN108498033A (zh) * | 2018-03-30 | 2018-09-07 | 德清华梦木制品有限公司 | 全自动拖擦刷清洗一体机的挤压清洗机构 |
-
2019
- 2019-05-30 CN CN202010180262.6A patent/CN111383977A/zh not_active Withdrawn
- 2019-05-30 CN CN201910462634.1A patent/CN110112086B/zh active Active
- 2019-05-30 CN CN202010180330.9A patent/CN111354663A/zh not_active Withdrawn
- 2019-05-30 CN CN202010180329.6A patent/CN111383966A/zh not_active Withdrawn
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56169343A (en) * | 1980-05-30 | 1981-12-26 | Fujitsu Ltd | Manufacture of semiconductor device |
CN101006833A (zh) * | 2006-01-06 | 2007-08-01 | 李卫红 | 全自动烹饪机器人系统 |
CN102161417A (zh) * | 2010-02-24 | 2011-08-24 | 村田自动化机械有限公司 | 输送车系统 |
CN102820246A (zh) * | 2011-06-09 | 2012-12-12 | 承澔科技股份有限公司 | 具有浮动导正机构的元件移载装置 |
CN103422143A (zh) * | 2013-08-01 | 2013-12-04 | 黄海 | 一种自动化电镀生产线 |
CN203530469U (zh) * | 2013-11-13 | 2014-04-09 | 深圳市美高塑胶金属制品有限公司 | 一种铜、镍、铬环形钓鱼式自动电镀加工系统 |
CN106469669A (zh) * | 2015-08-19 | 2017-03-01 | 三星显示有限公司 | 基板移送系统 |
CN106623173A (zh) * | 2016-10-17 | 2017-05-10 | 深圳市九利机械设备有限公司 | 一种电池清洗机 |
CN108498033A (zh) * | 2018-03-30 | 2018-09-07 | 德清华梦木制品有限公司 | 全自动拖擦刷清洗一体机的挤压清洗机构 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110676197A (zh) * | 2019-10-12 | 2020-01-10 | 盐城矽润半导体有限公司 | 一种精密半导体清洗装置 |
CN111081612A (zh) * | 2020-01-11 | 2020-04-28 | 深圳市昌富祥智能科技有限公司 | 一种半导体环形装片一体机 |
CN111252469A (zh) * | 2020-01-16 | 2020-06-09 | 阜阳佰恩得新材料技术有限公司 | 一种大蒜自动上料加工设备 |
CN111252469B (zh) * | 2020-01-16 | 2022-03-15 | 阜阳佰恩得新材料技术有限公司 | 一种大蒜自动上料加工设备 |
Also Published As
Publication number | Publication date |
---|---|
CN110112086B (zh) | 2020-04-07 |
CN111354663A (zh) | 2020-06-30 |
CN111383977A (zh) | 2020-07-07 |
CN111383966A (zh) | 2020-07-07 |
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Legal Events
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20200316 Address after: 325600 Sunshine Building, No. 459 Shuangyan Road, Yueqing City, Wenzhou City, Zhejiang Province, 13-502 Applicant after: Yueqing Ruiyi Economic Information Consulting Co.,Ltd. Address before: 350004 Fujian Crystal Array Semiconductor Company, Xueyuan Road, Shangjie Town, Minhou County, Fuzhou City, Fujian Province Applicant before: Teng Jimei |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211011 Address after: 271000 high end talent entrepreneurship base in the middle of Nantianmen street, high tech Zone, Tai'an City, Shandong Province Patentee after: Taian Zhongquan Information Technology Co.,Ltd. Address before: 325600 13-502, Sunshine Building, 459 Shuangyan Road, Yueqing City, Wenzhou City, Zhejiang Province Patentee before: Yueqing Ruiyi Economic Information Consulting Co.,Ltd. Effective date of registration: 20211011 Address after: 271000 China Taishan high-end talent entrepreneurship base in the middle of Nantianmen street, development zone, Tai'an City, Shandong Province Patentee after: Taian Taishan Technology Co.,Ltd. Address before: 271000 high end talent entrepreneurship base in the middle of Nantianmen street, high tech Zone, Tai'an City, Shandong Province Patentee before: Taian Zhongquan Information Technology Co.,Ltd. |
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Effective date of registration: 20231206 Address after: 215000, First Floor, Building A-4, No. 66 Wusong Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Ruizhiyuan Semiconductor Technology (Suzhou) Co.,Ltd. Address before: 271000 China Taishan high-end talent entrepreneurship base in the middle of Nantianmen street, development zone, Tai'an City, Shandong Province Patentee before: Taian Taishan Technology Co.,Ltd. |