JPS56162834A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS56162834A JPS56162834A JP6609280A JP6609280A JPS56162834A JP S56162834 A JPS56162834 A JP S56162834A JP 6609280 A JP6609280 A JP 6609280A JP 6609280 A JP6609280 A JP 6609280A JP S56162834 A JPS56162834 A JP S56162834A
- Authority
- JP
- Japan
- Prior art keywords
- segment
- width
- wafer
- pattern
- minimum width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000005530 etching Methods 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6609280A JPS56162834A (en) | 1980-05-19 | 1980-05-19 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6609280A JPS56162834A (en) | 1980-05-19 | 1980-05-19 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56162834A true JPS56162834A (en) | 1981-12-15 |
| JPS639656B2 JPS639656B2 (enrdf_load_stackoverflow) | 1988-03-01 |
Family
ID=13305870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6609280A Granted JPS56162834A (en) | 1980-05-19 | 1980-05-19 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56162834A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020091632A (ko) * | 2001-05-31 | 2002-12-06 | 엘지.필립스 엘시디 주식회사 | 슬릿형 포토 마스크 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02146652A (ja) * | 1988-11-29 | 1990-06-05 | Yokogawa Electric Corp | Ｉ／ｏマルチプレクサ |
-
1980
- 1980-05-19 JP JP6609280A patent/JPS56162834A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020091632A (ko) * | 2001-05-31 | 2002-12-06 | 엘지.필립스 엘시디 주식회사 | 슬릿형 포토 마스크 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS639656B2 (enrdf_load_stackoverflow) | 1988-03-01 |
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