JPS56144554A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS56144554A JPS56144554A JP4720880A JP4720880A JPS56144554A JP S56144554 A JPS56144554 A JP S56144554A JP 4720880 A JP4720880 A JP 4720880A JP 4720880 A JP4720880 A JP 4720880A JP S56144554 A JPS56144554 A JP S56144554A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- hillocks
- constitution
- insulating film
- interlayer insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent short-circuiting between electrodes by a method wherein after an Al surface layer which might produce hillocks has been slightly etched to completely remove the portions which become nuclei, then the second layer electrode is provided through an interlayer insulating film. CONSTITUTION:After the first layer Al 4 has been formed, the surface thereof is etched by approximately 1/3. Then, the Al is photoetched to form a wiring pattern, which is coated with an interlayer insulating film 5 and selectively opened to form the second layer Al 6. By said constitution, defective portions which might become the nuclei of hillocks are removed by the etching of the first layer Al, and the production of hillocks can be completely prevented also in the subsequent heat treatment. Accordingly, no short-circuiting occurs between the layers. A completely similar effect can be obtained if the first layer is an Al alloy such as Al-Si.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4720880A JPS56144554A (en) | 1980-04-10 | 1980-04-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4720880A JPS56144554A (en) | 1980-04-10 | 1980-04-10 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56144554A true JPS56144554A (en) | 1981-11-10 |
Family
ID=12768728
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4720880A Pending JPS56144554A (en) | 1980-04-10 | 1980-04-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56144554A (en) |
-
1980
- 1980-04-10 JP JP4720880A patent/JPS56144554A/en active Pending
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