JPS56144544A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS56144544A
JPS56144544A JP4808480A JP4808480A JPS56144544A JP S56144544 A JPS56144544 A JP S56144544A JP 4808480 A JP4808480 A JP 4808480A JP 4808480 A JP4808480 A JP 4808480A JP S56144544 A JPS56144544 A JP S56144544A
Authority
JP
Japan
Prior art keywords
oxidation
production
resist mask
reactive sputtering
defects caused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4808480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6257103B2 (enExample
Inventor
Yukio Tanuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4808480A priority Critical patent/JPS56144544A/ja
Publication of JPS56144544A publication Critical patent/JPS56144544A/ja
Publication of JPS6257103B2 publication Critical patent/JPS6257103B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/0125—
    • H10W10/13—

Landscapes

  • Formation Of Insulating Films (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
JP4808480A 1980-04-14 1980-04-14 Manufacture of semiconductor device Granted JPS56144544A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4808480A JPS56144544A (en) 1980-04-14 1980-04-14 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4808480A JPS56144544A (en) 1980-04-14 1980-04-14 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS56144544A true JPS56144544A (en) 1981-11-10
JPS6257103B2 JPS6257103B2 (enExample) 1987-11-30

Family

ID=12793451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4808480A Granted JPS56144544A (en) 1980-04-14 1980-04-14 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56144544A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5768033A (en) * 1980-10-16 1982-04-26 Toshiba Corp Manufacture of semiconductor device
JPH01290244A (ja) * 1988-05-18 1989-11-22 Sony Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5768033A (en) * 1980-10-16 1982-04-26 Toshiba Corp Manufacture of semiconductor device
JPH01290244A (ja) * 1988-05-18 1989-11-22 Sony Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6257103B2 (enExample) 1987-11-30

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