JPS56133876A - Manufacture of junction type field effect semiconductor device - Google Patents
Manufacture of junction type field effect semiconductor deviceInfo
- Publication number
- JPS56133876A JPS56133876A JP3724680A JP3724680A JPS56133876A JP S56133876 A JPS56133876 A JP S56133876A JP 3724680 A JP3724680 A JP 3724680A JP 3724680 A JP3724680 A JP 3724680A JP S56133876 A JPS56133876 A JP S56133876A
- Authority
- JP
- Japan
- Prior art keywords
- regions
- region
- semiconductor layer
- conductive metal
- metal layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 10
- 230000005669 field effect Effects 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002184 metal Substances 0.000 abstract 4
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE:To improve the electrical characteristics of a junction type field effect semiconductor device by a method wherein the cross sectional area of the current path of the current flowing through a semiconductor layer is controlled by the depletion layer extending from the P-N junction to the semiconductor layer side. CONSTITUTION:Regions 17 and 18 under conductive metal layers 13 and 14 on a semiconductor layer 2 are used as a source region and a drain region respectively, portions between adjacent semiconductor regions 10 in the semiconductor layer 2 and regions 19 outside the semiconductor regions on the outside in the arrangement of a plurality of semiconductor regions 10 are used as current regions, and conductive metal layers 13, 14 and 9 as source, drain and gate electrodes respectively. With current flowing via the conductive metal layers 13 and 14 as the source and drain electrodes and through the region 19 as the current path region into the semiconductor layer 2, applying between the conductive metal layers 9 and 13 a control voltage of polarity opposite to a P-N junction 11 permits the cross sectional area of the path of the current flowing through the region 19 to be controlled.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3724680A JPS56133876A (en) | 1980-03-24 | 1980-03-24 | Manufacture of junction type field effect semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3724680A JPS56133876A (en) | 1980-03-24 | 1980-03-24 | Manufacture of junction type field effect semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56133876A true JPS56133876A (en) | 1981-10-20 |
Family
ID=12492264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3724680A Pending JPS56133876A (en) | 1980-03-24 | 1980-03-24 | Manufacture of junction type field effect semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56133876A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61181170A (en) * | 1985-01-28 | 1986-08-13 | アルカテル イタリア ソシエタ ペル アチオニ | Mesfet transistor having air layer between a plurality of connections between gate electrode and substrate and manufacture thereof |
US5006478A (en) * | 1989-07-25 | 1991-04-09 | Sony Corporation | Method for manufacture of semiconductor device |
JPH03232241A (en) * | 1989-08-31 | 1991-10-16 | Mitsubishi Electric Corp | Semiconductor device and manufacture thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5219975A (en) * | 1975-08-06 | 1977-02-15 | Mitsubishi Electric Corp | Semiconductor device |
JPS5273681A (en) * | 1975-12-16 | 1977-06-20 | Toshiba Corp | Field effect transistor |
-
1980
- 1980-03-24 JP JP3724680A patent/JPS56133876A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5219975A (en) * | 1975-08-06 | 1977-02-15 | Mitsubishi Electric Corp | Semiconductor device |
JPS5273681A (en) * | 1975-12-16 | 1977-06-20 | Toshiba Corp | Field effect transistor |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61181170A (en) * | 1985-01-28 | 1986-08-13 | アルカテル イタリア ソシエタ ペル アチオニ | Mesfet transistor having air layer between a plurality of connections between gate electrode and substrate and manufacture thereof |
US5006478A (en) * | 1989-07-25 | 1991-04-09 | Sony Corporation | Method for manufacture of semiconductor device |
JPH03232241A (en) * | 1989-08-31 | 1991-10-16 | Mitsubishi Electric Corp | Semiconductor device and manufacture thereof |
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