JPS56133464A - Etching method - Google Patents

Etching method

Info

Publication number
JPS56133464A
JPS56133464A JP3798980A JP3798980A JPS56133464A JP S56133464 A JPS56133464 A JP S56133464A JP 3798980 A JP3798980 A JP 3798980A JP 3798980 A JP3798980 A JP 3798980A JP S56133464 A JPS56133464 A JP S56133464A
Authority
JP
Japan
Prior art keywords
substrate
etched
deposited
step parts
anisotropic etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3798980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6346152B2 (enrdf_load_stackoverflow
Inventor
Masaharu Yorikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP3798980A priority Critical patent/JPS56133464A/ja
Publication of JPS56133464A publication Critical patent/JPS56133464A/ja
Publication of JPS6346152B2 publication Critical patent/JPS6346152B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP3798980A 1980-03-25 1980-03-25 Etching method Granted JPS56133464A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3798980A JPS56133464A (en) 1980-03-25 1980-03-25 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3798980A JPS56133464A (en) 1980-03-25 1980-03-25 Etching method

Publications (2)

Publication Number Publication Date
JPS56133464A true JPS56133464A (en) 1981-10-19
JPS6346152B2 JPS6346152B2 (enrdf_load_stackoverflow) 1988-09-13

Family

ID=12512969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3798980A Granted JPS56133464A (en) 1980-03-25 1980-03-25 Etching method

Country Status (1)

Country Link
JP (1) JPS56133464A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014007350A (ja) * 2012-06-27 2014-01-16 Nippon Dempa Kogyo Co Ltd エッチング方法及びｍｅｍｓデバイス

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52736A (en) * 1975-06-23 1977-01-06 Kogyo Gijutsuin Method of forming fine patterns

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52736A (en) * 1975-06-23 1977-01-06 Kogyo Gijutsuin Method of forming fine patterns

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014007350A (ja) * 2012-06-27 2014-01-16 Nippon Dempa Kogyo Co Ltd エッチング方法及びｍｅｍｓデバイス

Also Published As

Publication number Publication date
JPS6346152B2 (enrdf_load_stackoverflow) 1988-09-13

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