JPS5583227A - Epitaxial growing - Google Patents

Epitaxial growing

Info

Publication number
JPS5583227A
JPS5583227A JP15972078A JP15972078A JPS5583227A JP S5583227 A JPS5583227 A JP S5583227A JP 15972078 A JP15972078 A JP 15972078A JP 15972078 A JP15972078 A JP 15972078A JP S5583227 A JPS5583227 A JP S5583227A
Authority
JP
Japan
Prior art keywords
layer
epitaxial
epitaxial growing
conventional method
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15972078A
Other languages
English (en)
Inventor
Masahiro Kuwagata
Katsufumi Kaminuma
Toshio Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP15972078A priority Critical patent/JPS5583227A/ja
Publication of JPS5583227A publication Critical patent/JPS5583227A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP15972078A 1978-12-20 1978-12-20 Epitaxial growing Pending JPS5583227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15972078A JPS5583227A (en) 1978-12-20 1978-12-20 Epitaxial growing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15972078A JPS5583227A (en) 1978-12-20 1978-12-20 Epitaxial growing

Publications (1)

Publication Number Publication Date
JPS5583227A true JPS5583227A (en) 1980-06-23

Family

ID=15699798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15972078A Pending JPS5583227A (en) 1978-12-20 1978-12-20 Epitaxial growing

Country Status (1)

Country Link
JP (1) JPS5583227A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5927521A (ja) * 1982-08-06 1984-02-14 Hitachi Ltd 半導体基体の製法
JPH01318265A (ja) * 1988-05-02 1989-12-22 Delco Electron Corp モノリシック感圧集積回路及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5927521A (ja) * 1982-08-06 1984-02-14 Hitachi Ltd 半導体基体の製法
JPH0361335B2 (ja) * 1982-08-06 1991-09-19 Hitachi Ltd
JPH01318265A (ja) * 1988-05-02 1989-12-22 Delco Electron Corp モノリシック感圧集積回路及びその製造方法

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