JPS5582469A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS5582469A
JPS5582469A JP15511278A JP15511278A JPS5582469A JP S5582469 A JPS5582469 A JP S5582469A JP 15511278 A JP15511278 A JP 15511278A JP 15511278 A JP15511278 A JP 15511278A JP S5582469 A JPS5582469 A JP S5582469A
Authority
JP
Japan
Prior art keywords
layer
etched
metallic layer
gate electrode
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15511278A
Other languages
English (en)
Other versions
JPS6122873B2 (ja
Inventor
Yoji Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP15511278A priority Critical patent/JPS5582469A/ja
Publication of JPS5582469A publication Critical patent/JPS5582469A/ja
Publication of JPS6122873B2 publication Critical patent/JPS6122873B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP15511278A 1978-12-14 1978-12-14 Preparation of semiconductor device Granted JPS5582469A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15511278A JPS5582469A (en) 1978-12-14 1978-12-14 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15511278A JPS5582469A (en) 1978-12-14 1978-12-14 Preparation of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5582469A true JPS5582469A (en) 1980-06-21
JPS6122873B2 JPS6122873B2 (ja) 1986-06-03

Family

ID=15598847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15511278A Granted JPS5582469A (en) 1978-12-14 1978-12-14 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5582469A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213171A (ja) * 1983-05-19 1984-12-03 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JPS62171164A (ja) * 1986-01-23 1987-07-28 Sumitomo Electric Ind Ltd 電界効果トランジスタ
JPS6378575A (ja) * 1986-09-22 1988-04-08 Hitachi Ltd 半導体装置の製造方法
JPH01154565A (ja) * 1987-12-10 1989-06-16 Fujitsu Ltd ジャンクションｆｅｔの製造方法
JPH01154564A (ja) * 1987-12-10 1989-06-16 Fujitsu Ltd ジャンクションｆｅｔの製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213171A (ja) * 1983-05-19 1984-12-03 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JPS62171164A (ja) * 1986-01-23 1987-07-28 Sumitomo Electric Ind Ltd 電界効果トランジスタ
JPS6378575A (ja) * 1986-09-22 1988-04-08 Hitachi Ltd 半導体装置の製造方法
JPH01154565A (ja) * 1987-12-10 1989-06-16 Fujitsu Ltd ジャンクションｆｅｔの製造方法
JPH01154564A (ja) * 1987-12-10 1989-06-16 Fujitsu Ltd ジャンクションｆｅｔの製造方法

Also Published As

Publication number Publication date
JPS6122873B2 (ja) 1986-06-03

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