JPS5578223A - Thermocouple - Google Patents

Thermocouple

Info

Publication number
JPS5578223A
JPS5578223A JP15157078A JP15157078A JPS5578223A JP S5578223 A JPS5578223 A JP S5578223A JP 15157078 A JP15157078 A JP 15157078A JP 15157078 A JP15157078 A JP 15157078A JP S5578223 A JPS5578223 A JP S5578223A
Authority
JP
Japan
Prior art keywords
thermocouple
film
coating
conductive film
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15157078A
Other languages
Japanese (ja)
Inventor
Tadayoshi Yoda
Toshihiko Fukuyama
Ikuo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP15157078A priority Critical patent/JPS5578223A/en
Publication of JPS5578223A publication Critical patent/JPS5578223A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

PURPOSE: To enable the thermocouple to be applied to the failure analysis of semiconductor integrated circuit by means of Auger electron spectroscopy, by providing the insulator film on the surface of the thermocouple metal body and making small the thermocouple through the coating and forming the conductive film on the insulator film.
CONSTITUTION: The insulation film 105 is coated on the exposed surface of the thermocouple metal wires 102, 103 made of Pt/PtRh and the conductive film 106 is coated on the film 105 to form the thermocouple. As the insulating material constituting the insulation film 105, SiO2, Si3N4, and prosphosilicate glass are used, and coating is made with vapor phase growing method and coating baking method. Further, as the conductive material constituting the conductive film 106, metals such as Mo, Cr, Ti, are used and coating is made by vapor phase growing method. vapor deposit method and sputtering method.
COPYRIGHT: (C)1980,JPO&Japio
JP15157078A 1978-12-07 1978-12-07 Thermocouple Pending JPS5578223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15157078A JPS5578223A (en) 1978-12-07 1978-12-07 Thermocouple

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15157078A JPS5578223A (en) 1978-12-07 1978-12-07 Thermocouple

Publications (1)

Publication Number Publication Date
JPS5578223A true JPS5578223A (en) 1980-06-12

Family

ID=15521405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15157078A Pending JPS5578223A (en) 1978-12-07 1978-12-07 Thermocouple

Country Status (1)

Country Link
JP (1) JPS5578223A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0394626A2 (en) * 1989-03-17 1990-10-31 International Business Machines Corporation Removable thermocouple template for monitoring temperature of multichip modules

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0394626A2 (en) * 1989-03-17 1990-10-31 International Business Machines Corporation Removable thermocouple template for monitoring temperature of multichip modules

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