JPS5578223A - Thermocouple - Google Patents
ThermocoupleInfo
- Publication number
- JPS5578223A JPS5578223A JP15157078A JP15157078A JPS5578223A JP S5578223 A JPS5578223 A JP S5578223A JP 15157078 A JP15157078 A JP 15157078A JP 15157078 A JP15157078 A JP 15157078A JP S5578223 A JPS5578223 A JP S5578223A
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- film
- coating
- conductive film
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
PURPOSE: To enable the thermocouple to be applied to the failure analysis of semiconductor integrated circuit by means of Auger electron spectroscopy, by providing the insulator film on the surface of the thermocouple metal body and making small the thermocouple through the coating and forming the conductive film on the insulator film.
CONSTITUTION: The insulation film 105 is coated on the exposed surface of the thermocouple metal wires 102, 103 made of Pt/PtRh and the conductive film 106 is coated on the film 105 to form the thermocouple. As the insulating material constituting the insulation film 105, SiO2, Si3N4, and prosphosilicate glass are used, and coating is made with vapor phase growing method and coating baking method. Further, as the conductive material constituting the conductive film 106, metals such as Mo, Cr, Ti, are used and coating is made by vapor phase growing method. vapor deposit method and sputtering method.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15157078A JPS5578223A (en) | 1978-12-07 | 1978-12-07 | Thermocouple |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15157078A JPS5578223A (en) | 1978-12-07 | 1978-12-07 | Thermocouple |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5578223A true JPS5578223A (en) | 1980-06-12 |
Family
ID=15521405
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15157078A Pending JPS5578223A (en) | 1978-12-07 | 1978-12-07 | Thermocouple |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5578223A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0394626A2 (en) * | 1989-03-17 | 1990-10-31 | International Business Machines Corporation | Removable thermocouple template for monitoring temperature of multichip modules |
-
1978
- 1978-12-07 JP JP15157078A patent/JPS5578223A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0394626A2 (en) * | 1989-03-17 | 1990-10-31 | International Business Machines Corporation | Removable thermocouple template for monitoring temperature of multichip modules |
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