JPS5492270A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5492270A JPS5492270A JP16014177A JP16014177A JPS5492270A JP S5492270 A JPS5492270 A JP S5492270A JP 16014177 A JP16014177 A JP 16014177A JP 16014177 A JP16014177 A JP 16014177A JP S5492270 A JPS5492270 A JP S5492270A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- metal boride
- resistor
- heating element
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To obtain a thermal head which is hard to be oxidized, is stable in resistance value and permits selection of specific resistance up to a high value by using a heating resistor composed of metal boride and carbon.
CONSTITUTION: A thin film heating resistor 2 which is composed of metal boride and carbon by making sputtering or other of the target of metal boride in a mixed atmosphere of argon and methane to let carbon be contained at more than 0.005 of the total weight of the metal in atom ratio in a resistor is formed on a substrate 1 composed of an electrical insulator such as ceramics, glass or other. An electric conductor 3 which is formed of good electric conductor such as aluminum, gold or other and supplies electric power to the heating element 2 is provided thereon. The heating element 2 and conductor 3 are combined with the silicon oxide, tantalum oxide or these having been made by, e.g., electron beam vapor deposition, sputtering ot other to form a protecting layer 4. Thereby the life of the head may be made much longer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52160141A JPS6038002B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52160141A JPS6038002B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5492270A true JPS5492270A (en) | 1979-07-21 |
JPS6038002B2 JPS6038002B2 (en) | 1985-08-29 |
Family
ID=15708749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52160141A Expired JPS6038002B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6038002B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5842472A (en) * | 1981-09-07 | 1983-03-11 | Semiconductor Energy Lab Co Ltd | Thermal head |
JPS6237902A (en) * | 1985-08-13 | 1987-02-18 | 松下電器産業株式会社 | Thermal head |
-
1977
- 1977-12-28 JP JP52160141A patent/JPS6038002B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5842472A (en) * | 1981-09-07 | 1983-03-11 | Semiconductor Energy Lab Co Ltd | Thermal head |
JPS6153955B2 (en) * | 1981-09-07 | 1986-11-20 | Handotai Energy Kenkyusho | |
JPS6237902A (en) * | 1985-08-13 | 1987-02-18 | 松下電器産業株式会社 | Thermal head |
Also Published As
Publication number | Publication date |
---|---|
JPS6038002B2 (en) | 1985-08-29 |
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