JPS5492268A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5492268A JPS5492268A JP16013977A JP16013977A JPS5492268A JP S5492268 A JPS5492268 A JP S5492268A JP 16013977 A JP16013977 A JP 16013977A JP 16013977 A JP16013977 A JP 16013977A JP S5492268 A JPS5492268 A JP S5492268A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- hafnium
- hafnium boride
- heating element
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 4
- 239000001301 oxygen Substances 0.000 abstract 4
- 229910052760 oxygen Inorganic materials 0.000 abstract 4
- LRTTZMZPZHBOPO-UHFFFAOYSA-N [B].[B].[Hf] Chemical compound [B].[B].[Hf] LRTTZMZPZHBOPO-UHFFFAOYSA-N 0.000 abstract 3
- 239000004020 conductor Substances 0.000 abstract 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 abstract 1
- 239000000615 nonconductor Substances 0.000 abstract 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910001936 tantalum oxide Inorganic materials 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Landscapes
- Electronic Switches (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To obtain a thermal head which is hard to be oxidized, is stable in resistance value and permits selection of specific resistance up to a high value by using a heating resistor composed of hafnium boride and oxygen.
CONSTITUTION: A thin film heating resistor 2 which is composed of hafnium boride and oxygen by making sputtering or other of the target of hafnium boride in a mixed atmosphere of argon and oxygen to let oxygen be contained at more than 0.005 of the hafnium in atom ratio is formed on a substrate 1 composed of an electrical insulator such as ceramics, glass or other. An electric conductor 3 which is formed of good electric conductor such as aluminum, gold or other and supplies electric power to the heating element 2 is provided thereon. The heating element 2 and conductor 3 are combined with the silicon oxide, tantalum oxide or these having been made by, e.g., electron beam vapor deposition, sputtering or other to form a protecting layer 4. Thereby the life of the head may be made much longer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52160139A JPS598234B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
| US05/906,359 US4296309A (en) | 1977-05-19 | 1978-05-15 | Thermal head |
| DE19782821950 DE2821950A1 (en) | 1977-05-19 | 1978-05-19 | Head for thermal printing with stable resistance - obtd. by sputtering a metal boride resistance heating element onto a glazed substrate |
| US06/552,013 US4545881A (en) | 1977-05-19 | 1983-11-16 | Method for producing electro-thermal transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52160139A JPS598234B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5492268A true JPS5492268A (en) | 1979-07-21 |
| JPS598234B2 JPS598234B2 (en) | 1984-02-23 |
Family
ID=15708704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52160139A Expired JPS598234B2 (en) | 1977-05-19 | 1977-12-28 | thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS598234B2 (en) |
-
1977
- 1977-12-28 JP JP52160139A patent/JPS598234B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS598234B2 (en) | 1984-02-23 |
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