JPS5492276A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5492276A JPS5492276A JP16014777A JP16014777A JPS5492276A JP S5492276 A JPS5492276 A JP S5492276A JP 16014777 A JP16014777 A JP 16014777A JP 16014777 A JP16014777 A JP 16014777A JP S5492276 A JPS5492276 A JP S5492276A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- tantalum
- heating element
- sputtering
- thermal head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To obtain a thermal head which is hard to be oxidized, is stable in resistance value and permits selection of specific resistance up to a high value by using a heating resistor composed of tantalum boride and oxygen.
CONSTITUTION: A thin film heating resistor 2 which is composed of tantalum boride and oxygen by making sputtering or other of the target of tantalum boride in a mixed atmosphere of argon and oxygen to let oxygen be contained at more than 0.005 of the tantalum in atom ratio is formed on a substrate 1 composed of an electrical insulator such as ceramics, glass or other. An electric conductor 3 which is formed of good electric conductor such as aluminum, gold or other and supplies electric power to the heating element 2 is provided thereon. The heating element 2 and conductor 3 are combined with the silicon oxide, tantalum oxide or these having been made by, e.g., electron beam vapor deposition, sputtering or other to form a protecting layer 4. Thereby the life of the head may be made much longer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52160147A JPS6038008B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
US05/906,359 US4296309A (en) | 1977-05-19 | 1978-05-15 | Thermal head |
US06/552,013 US4545881A (en) | 1977-05-19 | 1983-11-16 | Method for producing electro-thermal transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52160147A JPS6038008B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5492276A true JPS5492276A (en) | 1979-07-21 |
JPS6038008B2 JPS6038008B2 (en) | 1985-08-29 |
Family
ID=15708876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52160147A Expired JPS6038008B2 (en) | 1977-05-19 | 1977-12-28 | thermal head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6038008B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62202754A (en) * | 1986-03-03 | 1987-09-07 | Tdk Corp | Thin film type thermal head |
JPS62202755A (en) * | 1986-03-03 | 1987-09-07 | Tdk Corp | Thin film type thermal head |
-
1977
- 1977-12-28 JP JP52160147A patent/JPS6038008B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62202754A (en) * | 1986-03-03 | 1987-09-07 | Tdk Corp | Thin film type thermal head |
JPS62202755A (en) * | 1986-03-03 | 1987-09-07 | Tdk Corp | Thin film type thermal head |
JPH0712691B2 (en) * | 1986-03-03 | 1995-02-15 | ティーディーケイ株式会社 | Thin-film thermal head |
JPH0712690B2 (en) * | 1986-03-03 | 1995-02-15 | ティーディーケイ株式会社 | Thin-film thermal head |
Also Published As
Publication number | Publication date |
---|---|
JPS6038008B2 (en) | 1985-08-29 |
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