JPS5492276A - Thermal head - Google Patents

Thermal head

Info

Publication number
JPS5492276A
JPS5492276A JP16014777A JP16014777A JPS5492276A JP S5492276 A JPS5492276 A JP S5492276A JP 16014777 A JP16014777 A JP 16014777A JP 16014777 A JP16014777 A JP 16014777A JP S5492276 A JPS5492276 A JP S5492276A
Authority
JP
Japan
Prior art keywords
oxygen
tantalum
heating element
sputtering
thermal head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16014777A
Other languages
Japanese (ja)
Other versions
JPS6038008B2 (en
Inventor
Toshitami Hara
Akira Niimi
Masahisa Fukui
Yoshiaki Shirato
Yoshiki Hajimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP52160147A priority Critical patent/JPS6038008B2/en
Priority to US05/906,359 priority patent/US4296309A/en
Publication of JPS5492276A publication Critical patent/JPS5492276A/en
Priority to US06/552,013 priority patent/US4545881A/en
Publication of JPS6038008B2 publication Critical patent/JPS6038008B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electronic Switches (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To obtain a thermal head which is hard to be oxidized, is stable in resistance value and permits selection of specific resistance up to a high value by using a heating resistor composed of tantalum boride and oxygen.
CONSTITUTION: A thin film heating resistor 2 which is composed of tantalum boride and oxygen by making sputtering or other of the target of tantalum boride in a mixed atmosphere of argon and oxygen to let oxygen be contained at more than 0.005 of the tantalum in atom ratio is formed on a substrate 1 composed of an electrical insulator such as ceramics, glass or other. An electric conductor 3 which is formed of good electric conductor such as aluminum, gold or other and supplies electric power to the heating element 2 is provided thereon. The heating element 2 and conductor 3 are combined with the silicon oxide, tantalum oxide or these having been made by, e.g., electron beam vapor deposition, sputtering or other to form a protecting layer 4. Thereby the life of the head may be made much longer.
COPYRIGHT: (C)1979,JPO&Japio
JP52160147A 1977-05-19 1977-12-28 thermal head Expired JPS6038008B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP52160147A JPS6038008B2 (en) 1977-12-28 1977-12-28 thermal head
US05/906,359 US4296309A (en) 1977-05-19 1978-05-15 Thermal head
US06/552,013 US4545881A (en) 1977-05-19 1983-11-16 Method for producing electro-thermal transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52160147A JPS6038008B2 (en) 1977-12-28 1977-12-28 thermal head

Publications (2)

Publication Number Publication Date
JPS5492276A true JPS5492276A (en) 1979-07-21
JPS6038008B2 JPS6038008B2 (en) 1985-08-29

Family

ID=15708876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52160147A Expired JPS6038008B2 (en) 1977-05-19 1977-12-28 thermal head

Country Status (1)

Country Link
JP (1) JPS6038008B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62202754A (en) * 1986-03-03 1987-09-07 Tdk Corp Thin film type thermal head
JPS62202755A (en) * 1986-03-03 1987-09-07 Tdk Corp Thin film type thermal head

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62202754A (en) * 1986-03-03 1987-09-07 Tdk Corp Thin film type thermal head
JPS62202755A (en) * 1986-03-03 1987-09-07 Tdk Corp Thin film type thermal head
JPH0712691B2 (en) * 1986-03-03 1995-02-15 ティーディーケイ株式会社 Thin-film thermal head
JPH0712690B2 (en) * 1986-03-03 1995-02-15 ティーディーケイ株式会社 Thin-film thermal head

Also Published As

Publication number Publication date
JPS6038008B2 (en) 1985-08-29

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