JPS5492277A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5492277A JPS5492277A JP16014877A JP16014877A JPS5492277A JP S5492277 A JPS5492277 A JP S5492277A JP 16014877 A JP16014877 A JP 16014877A JP 16014877 A JP16014877 A JP 16014877A JP S5492277 A JPS5492277 A JP S5492277A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- niobium
- niobium boride
- heating element
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 4
- 239000001301 oxygen Substances 0.000 abstract 4
- 229910052760 oxygen Inorganic materials 0.000 abstract 4
- VDZMENNHPJNJPP-UHFFFAOYSA-N boranylidyneniobium Chemical compound [Nb]#B VDZMENNHPJNJPP-UHFFFAOYSA-N 0.000 abstract 3
- 239000004020 conductor Substances 0.000 abstract 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 239000010955 niobium Substances 0.000 abstract 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract 1
- 239000000615 nonconductor Substances 0.000 abstract 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910001936 tantalum oxide Inorganic materials 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Landscapes
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To obtain a thermal head which is hard to be oxidized, is stable in resistance value and permits selection of specific resistance up to a high value by using a heating resistor composed of niobium boride and oxygen.
CONSTITUTION: A thin film heating resistor 2 which is composed of niobium boride and oxygen by making sputtering or other of the target of niobium boride in a mixed atmosphere of argon and oxygen to let oxygen be contained at more than 0.005 of the niobium in atom ratio is formed on a substrate 1 composed of an electrical insulator such as ceramics, glass or other. An electric conductor 3 which is formed of good electric conductor such as aluminum, gold or other and supplies electric power to the heating element 2 is provided thereon. The heating element 2 and conductor 3 are combined with the silicon oxide, tantalum oxide or these having been made by, e.g., electron beam vapor deposition, sputtering or other to form a protecting layer 4. Thereby the life of the head may be made much longer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52160148A JPS6038009B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
| US05/906,359 US4296309A (en) | 1977-05-19 | 1978-05-15 | Thermal head |
| US06/552,013 US4545881A (en) | 1977-05-19 | 1983-11-16 | Method for producing electro-thermal transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52160148A JPS6038009B2 (en) | 1977-12-28 | 1977-12-28 | thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5492277A true JPS5492277A (en) | 1979-07-21 |
| JPS6038009B2 JPS6038009B2 (en) | 1985-08-29 |
Family
ID=15708897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52160148A Expired JPS6038009B2 (en) | 1977-05-19 | 1977-12-28 | thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6038009B2 (en) |
-
1977
- 1977-12-28 JP JP52160148A patent/JPS6038009B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6038009B2 (en) | 1985-08-29 |
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