JPS56126756A - Humidity-sensitive element - Google Patents

Humidity-sensitive element

Info

Publication number
JPS56126756A
JPS56126756A JP2992280A JP2992280A JPS56126756A JP S56126756 A JPS56126756 A JP S56126756A JP 2992280 A JP2992280 A JP 2992280A JP 2992280 A JP2992280 A JP 2992280A JP S56126756 A JPS56126756 A JP S56126756A
Authority
JP
Japan
Prior art keywords
humidity
silicone
sensitive
sensitive element
sensitive part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2992280A
Other languages
Japanese (ja)
Other versions
JPS6154175B2 (en
Inventor
Hidefusa Uchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2992280A priority Critical patent/JPS56126756A/en
Publication of JPS56126756A publication Critical patent/JPS56126756A/en
Publication of JPS6154175B2 publication Critical patent/JPS6154175B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Non-Adjustable Resistors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To obtain a humidity-sensitive element having a wide measurable region of humidity, excellent sensitivity, large strength and high chemical stability by using as a humidity-sensitive part a porous residue obtained by decomposing at high temperature a composition whose main constituent is a polymer (silicone) of an organic silicon compound. CONSTITUTION:A composition whose main constituent is a silicone such as silicon resin or silicone grease is applied on an insulation substrate 3 such as alumina, and baked at 400-600 deg.C, to thereby form humidity-sensitive part 4. Next, a pair of electrodes 1, 1 such as Au are formed by vapor deposition or the like and conductors 2, 2 are fitted thereto, whereby the humidity-sensitive element is prepared. The humidity-sensitive part 4 thus obtained is porous, the variation in a resistance value thereof in the range of 0-100% RH is large, the strength and chemical stability of the element is also large, repeated measurement caused little change, the velocity of response is high, and the baking temperature for the part is low enough in comparison with conventional methods.
JP2992280A 1980-03-10 1980-03-10 Humidity-sensitive element Granted JPS56126756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2992280A JPS56126756A (en) 1980-03-10 1980-03-10 Humidity-sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2992280A JPS56126756A (en) 1980-03-10 1980-03-10 Humidity-sensitive element

Publications (2)

Publication Number Publication Date
JPS56126756A true JPS56126756A (en) 1981-10-05
JPS6154175B2 JPS6154175B2 (en) 1986-11-21

Family

ID=12289478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2992280A Granted JPS56126756A (en) 1980-03-10 1980-03-10 Humidity-sensitive element

Country Status (1)

Country Link
JP (1) JPS56126756A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0090048A1 (en) * 1981-09-30 1983-10-05 Mitsubishi Denki Kabushiki Kaisha Humidity sensor
JPS5990037A (en) * 1982-11-16 1984-05-24 Mitsubishi Electric Corp Moisture sensitive material

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261879A (en) * 1986-05-06 1987-11-14 三菱電機株式会社 Refrigerator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0090048A1 (en) * 1981-09-30 1983-10-05 Mitsubishi Denki Kabushiki Kaisha Humidity sensor
US4621249A (en) * 1981-09-30 1986-11-04 Mitsubishi Denki Kabushiki Kaisha Moisture sensitive element
US4673910A (en) * 1981-09-30 1987-06-16 Mitsubishi Denki Kabushiki Kaisha Moisture sensitive element containing high temperature decomposition residue of organo-silicon polymer as sensitive element
JPS5990037A (en) * 1982-11-16 1984-05-24 Mitsubishi Electric Corp Moisture sensitive material

Also Published As

Publication number Publication date
JPS6154175B2 (en) 1986-11-21

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