JPS5548933A - Forming of mesa groove - Google Patents
Forming of mesa grooveInfo
- Publication number
- JPS5548933A JPS5548933A JP12221278A JP12221278A JPS5548933A JP S5548933 A JPS5548933 A JP S5548933A JP 12221278 A JP12221278 A JP 12221278A JP 12221278 A JP12221278 A JP 12221278A JP S5548933 A JPS5548933 A JP S5548933A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etching solution
- film
- mesa groove
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a film of uniform thickness, by operating etching with No.1 etching solution via a film having an etching window, and subsequently operating etching with No.2 etching solution, and thereby forming a mesa groove with a circular or obtuse-angled opening part.
CONSTITUTION: Etching is done with No.1 etching solution consisting of a mixture of nitric acid 6, fluoric acid 1 and acetic acid 2, in volume ratio, via a film having etching window 2 formed on the surface of semiconductor wafer 1. Subsequently, etching is done with No.2 etching solution consisting of a mixture of nitric acid 5 and fluoric acid 1, in volume ratio. Here, wafer 1 is etched with No.2 etching solution, which has a higher speed than No.1 etching solution, and mesa groove 4 with a circular or obtuse-angled opening part is formed, and thereby a film of uniform thickness is obtained.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12221278A JPS5548933A (en) | 1978-10-03 | 1978-10-03 | Forming of mesa groove |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12221278A JPS5548933A (en) | 1978-10-03 | 1978-10-03 | Forming of mesa groove |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5548933A true JPS5548933A (en) | 1980-04-08 |
Family
ID=14830318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12221278A Pending JPS5548933A (en) | 1978-10-03 | 1978-10-03 | Forming of mesa groove |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5548933A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4387682A (en) * | 1980-09-26 | 1983-06-14 | Toyota Jidosha Kogyo Kabushiki Kaisha | Method and apparatus for controlling the air intake of an internal combustion engine |
US4680615A (en) * | 1984-06-14 | 1987-07-14 | Brown, Boveri & Cie Ag | Silicon semiconductor component with an edge contour made by an etching technique, and method for manufacturing this component |
-
1978
- 1978-10-03 JP JP12221278A patent/JPS5548933A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4387682A (en) * | 1980-09-26 | 1983-06-14 | Toyota Jidosha Kogyo Kabushiki Kaisha | Method and apparatus for controlling the air intake of an internal combustion engine |
US4680615A (en) * | 1984-06-14 | 1987-07-14 | Brown, Boveri & Cie Ag | Silicon semiconductor component with an edge contour made by an etching technique, and method for manufacturing this component |
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