JPS52144271A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS52144271A
JPS52144271A JP6061376A JP6061376A JPS52144271A JP S52144271 A JPS52144271 A JP S52144271A JP 6061376 A JP6061376 A JP 6061376A JP 6061376 A JP6061376 A JP 6061376A JP S52144271 A JPS52144271 A JP S52144271A
Authority
JP
Japan
Prior art keywords
preparation
semiconductor device
compound semiconductor
boat
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6061376A
Other languages
Japanese (ja)
Inventor
Kazutoshi Konno
Minoru Akatsuka
Kunihiro Katase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6061376A priority Critical patent/JPS52144271A/en
Publication of JPS52144271A publication Critical patent/JPS52144271A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE: To bring a compound semiconductor in contact with the inner wall of a rotating type boat and immerse the compound semiconductor in a saturation solution by rotating the boat, whereby a grown layer is formed on the surface thereof.
COPYRIGHT: (C)1977,JPO&Japio
JP6061376A 1976-05-27 1976-05-27 Preparation of semiconductor device Pending JPS52144271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6061376A JPS52144271A (en) 1976-05-27 1976-05-27 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6061376A JPS52144271A (en) 1976-05-27 1976-05-27 Preparation of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52144271A true JPS52144271A (en) 1977-12-01

Family

ID=13147286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6061376A Pending JPS52144271A (en) 1976-05-27 1976-05-27 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52144271A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834925A (en) * 1981-08-25 1983-03-01 Fujitsu Ltd Liquid phase epitaxial growth device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834925A (en) * 1981-08-25 1983-03-01 Fujitsu Ltd Liquid phase epitaxial growth device
JPH0338736B2 (en) * 1981-08-25 1991-06-11 Fujitsu Ltd

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