JPS52144271A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS52144271A JPS52144271A JP6061376A JP6061376A JPS52144271A JP S52144271 A JPS52144271 A JP S52144271A JP 6061376 A JP6061376 A JP 6061376A JP 6061376 A JP6061376 A JP 6061376A JP S52144271 A JPS52144271 A JP S52144271A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- semiconductor device
- compound semiconductor
- boat
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE: To bring a compound semiconductor in contact with the inner wall of a rotating type boat and immerse the compound semiconductor in a saturation solution by rotating the boat, whereby a grown layer is formed on the surface thereof.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6061376A JPS52144271A (en) | 1976-05-27 | 1976-05-27 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6061376A JPS52144271A (en) | 1976-05-27 | 1976-05-27 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52144271A true JPS52144271A (en) | 1977-12-01 |
Family
ID=13147286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6061376A Pending JPS52144271A (en) | 1976-05-27 | 1976-05-27 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52144271A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5834925A (en) * | 1981-08-25 | 1983-03-01 | Fujitsu Ltd | Liquid phase epitaxial growth device |
-
1976
- 1976-05-27 JP JP6061376A patent/JPS52144271A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5834925A (en) * | 1981-08-25 | 1983-03-01 | Fujitsu Ltd | Liquid phase epitaxial growth device |
JPH0338736B2 (en) * | 1981-08-25 | 1991-06-11 | Fujitsu Ltd |
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