JPS52150972A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52150972A JPS52150972A JP6807776A JP6807776A JPS52150972A JP S52150972 A JPS52150972 A JP S52150972A JP 6807776 A JP6807776 A JP 6807776A JP 6807776 A JP6807776 A JP 6807776A JP S52150972 A JPS52150972 A JP S52150972A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- porous
- beforehand
- doping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE: To reduce the serrations produced on Si surface by beforehand doping B into porous Si thereby forming a porous SiO2 film which is chemically stable and is low in etching speed.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6807776A JPS52150972A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6807776A JPS52150972A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52150972A true JPS52150972A (en) | 1977-12-15 |
JPS579497B2 JPS579497B2 (en) | 1982-02-22 |
Family
ID=13363332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6807776A Granted JPS52150972A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52150972A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59109493U (en) * | 1983-01-13 | 1984-07-24 | 東京スタツク株式会社 | Paper holding device for manual paper cutter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5242079A (en) * | 1975-09-30 | 1977-04-01 | Toshiba Corp | Process for producing semiconductor |
-
1976
- 1976-06-10 JP JP6807776A patent/JPS52150972A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5242079A (en) * | 1975-09-30 | 1977-04-01 | Toshiba Corp | Process for producing semiconductor |
Also Published As
Publication number | Publication date |
---|---|
JPS579497B2 (en) | 1982-02-22 |
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