JPS52150972A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52150972A
JPS52150972A JP6807776A JP6807776A JPS52150972A JP S52150972 A JPS52150972 A JP S52150972A JP 6807776 A JP6807776 A JP 6807776A JP 6807776 A JP6807776 A JP 6807776A JP S52150972 A JPS52150972 A JP S52150972A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
porous
beforehand
doping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6807776A
Other languages
Japanese (ja)
Other versions
JPS579497B2 (en
Inventor
Kuniyuki Hamano
Kazuo Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6807776A priority Critical patent/JPS52150972A/en
Publication of JPS52150972A publication Critical patent/JPS52150972A/en
Publication of JPS579497B2 publication Critical patent/JPS579497B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To reduce the serrations produced on Si surface by beforehand doping B into porous Si thereby forming a porous SiO2 film which is chemically stable and is low in etching speed.
COPYRIGHT: (C)1977,JPO&Japio
JP6807776A 1976-06-10 1976-06-10 Production of semiconductor device Granted JPS52150972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6807776A JPS52150972A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6807776A JPS52150972A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52150972A true JPS52150972A (en) 1977-12-15
JPS579497B2 JPS579497B2 (en) 1982-02-22

Family

ID=13363332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6807776A Granted JPS52150972A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52150972A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109493U (en) * 1983-01-13 1984-07-24 東京スタツク株式会社 Paper holding device for manual paper cutter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242079A (en) * 1975-09-30 1977-04-01 Toshiba Corp Process for producing semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242079A (en) * 1975-09-30 1977-04-01 Toshiba Corp Process for producing semiconductor

Also Published As

Publication number Publication date
JPS579497B2 (en) 1982-02-22

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