JPS5544708A - Alignment device - Google Patents
Alignment deviceInfo
- Publication number
- JPS5544708A JPS5544708A JP11656178A JP11656178A JPS5544708A JP S5544708 A JPS5544708 A JP S5544708A JP 11656178 A JP11656178 A JP 11656178A JP 11656178 A JP11656178 A JP 11656178A JP S5544708 A JPS5544708 A JP S5544708A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- wafer
- rotating
- prober
- many
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Input (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11656178A JPS5544708A (en) | 1978-09-25 | 1978-09-25 | Alignment device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11656178A JPS5544708A (en) | 1978-09-25 | 1978-09-25 | Alignment device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5544708A true JPS5544708A (en) | 1980-03-29 |
Family
ID=14690149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11656178A Pending JPS5544708A (en) | 1978-09-25 | 1978-09-25 | Alignment device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5544708A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57115843A (en) * | 1981-01-10 | 1982-07-19 | Mitsubishi Electric Corp | Testing device for wafer |
JPS6049642A (ja) * | 1983-08-29 | 1985-03-18 | Nec Corp | 半導体装置の検査装置 |
JPS6129911A (ja) * | 1984-07-23 | 1986-02-12 | Nippon Lsi Kk | 位置決め装置 |
JP2002222751A (ja) * | 2001-01-25 | 2002-08-09 | Nitto Kogaku Kk | アライメント装置および組立て装置 |
US6876946B2 (en) * | 1993-01-21 | 2005-04-05 | Nikon Corporation | Alignment method and apparatus therefor |
CN106680991A (zh) * | 2016-07-26 | 2017-05-17 | 京东方科技集团股份有限公司 | 识别装置及对位设备 |
-
1978
- 1978-09-25 JP JP11656178A patent/JPS5544708A/ja active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57115843A (en) * | 1981-01-10 | 1982-07-19 | Mitsubishi Electric Corp | Testing device for wafer |
JPS6049642A (ja) * | 1983-08-29 | 1985-03-18 | Nec Corp | 半導体装置の検査装置 |
JPS6129911A (ja) * | 1984-07-23 | 1986-02-12 | Nippon Lsi Kk | 位置決め装置 |
US6876946B2 (en) * | 1993-01-21 | 2005-04-05 | Nikon Corporation | Alignment method and apparatus therefor |
JP2002222751A (ja) * | 2001-01-25 | 2002-08-09 | Nitto Kogaku Kk | アライメント装置および組立て装置 |
JP4574871B2 (ja) * | 2001-01-25 | 2010-11-04 | 日東光学株式会社 | アライメント装置および組立て装置 |
CN106680991A (zh) * | 2016-07-26 | 2017-05-17 | 京东方科技集团股份有限公司 | 识别装置及对位设备 |
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