JPS54134982A - Detector for street position on semiconductor wafer - Google Patents
Detector for street position on semiconductor waferInfo
- Publication number
- JPS54134982A JPS54134982A JP4211578A JP4211578A JPS54134982A JP S54134982 A JPS54134982 A JP S54134982A JP 4211578 A JP4211578 A JP 4211578A JP 4211578 A JP4211578 A JP 4211578A JP S54134982 A JPS54134982 A JP S54134982A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- street
- semiconductor wafer
- basis
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Dicing (AREA)
Abstract
PURPOSE: To detect a street position on a wafer with high precision by totalizing reflected light images over the wide region, through a slit scan by irradiating a semiconductor wafer with light while moving the wafer mounted on a table.
CONSTITUTION: Horizontally-symmetric detection parts 100 and 101 detect street 3 between chips 2 on semiconductor wafer 1 and on the basis of the detection result, the Y direction and θ direction of water 1 are fixed to reference position 81 of the optical system. Next, wafer 1 is turned by 90 degrees and X-directional positioning is also attained in the same way. Namely, coarse detecting illumination 28 is used and while wafer 1 is being moved, position detection circuit 102 detects street 3 coarsely; and switching to fine-detecting illumination 29 is made and on the basis of the previously-obtained coarse-detection value and image signal 90 obtained at this time, position detection circuit 102 displays the fine position of street 3. Then, motor control circuit 103 moves table 14 correspondingly to position wafer 1.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4211578A JPS54134982A (en) | 1978-04-12 | 1978-04-12 | Detector for street position on semiconductor wafer |
US05/964,353 US4213117A (en) | 1977-11-28 | 1978-11-28 | Method and apparatus for detecting positions of chips on a semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4211578A JPS54134982A (en) | 1978-04-12 | 1978-04-12 | Detector for street position on semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54134982A true JPS54134982A (en) | 1979-10-19 |
JPS6152979B2 JPS6152979B2 (en) | 1986-11-15 |
Family
ID=12626944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4211578A Granted JPS54134982A (en) | 1977-11-28 | 1978-04-12 | Detector for street position on semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54134982A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5788414A (en) * | 1980-11-21 | 1982-06-02 | Seiko Epson Corp | Alignment device |
JP2012250338A (en) * | 2011-06-07 | 2012-12-20 | Disco Corp | Machining device |
-
1978
- 1978-04-12 JP JP4211578A patent/JPS54134982A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5788414A (en) * | 1980-11-21 | 1982-06-02 | Seiko Epson Corp | Alignment device |
JP2012250338A (en) * | 2011-06-07 | 2012-12-20 | Disco Corp | Machining device |
Also Published As
Publication number | Publication date |
---|---|
JPS6152979B2 (en) | 1986-11-15 |
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