JPS54134982A - Detector for street position on semiconductor wafer - Google Patents

Detector for street position on semiconductor wafer

Info

Publication number
JPS54134982A
JPS54134982A JP4211578A JP4211578A JPS54134982A JP S54134982 A JPS54134982 A JP S54134982A JP 4211578 A JP4211578 A JP 4211578A JP 4211578 A JP4211578 A JP 4211578A JP S54134982 A JPS54134982 A JP S54134982A
Authority
JP
Japan
Prior art keywords
wafer
street
semiconductor wafer
basis
detect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4211578A
Other languages
Japanese (ja)
Other versions
JPS6152979B2 (en
Inventor
Yukio Kenbo
Tomohiro Kuji
Hiroshi Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4211578A priority Critical patent/JPS54134982A/en
Priority to US05/964,353 priority patent/US4213117A/en
Publication of JPS54134982A publication Critical patent/JPS54134982A/en
Publication of JPS6152979B2 publication Critical patent/JPS6152979B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Dicing (AREA)

Abstract

PURPOSE: To detect a street position on a wafer with high precision by totalizing reflected light images over the wide region, through a slit scan by irradiating a semiconductor wafer with light while moving the wafer mounted on a table.
CONSTITUTION: Horizontally-symmetric detection parts 100 and 101 detect street 3 between chips 2 on semiconductor wafer 1 and on the basis of the detection result, the Y direction and θ direction of water 1 are fixed to reference position 81 of the optical system. Next, wafer 1 is turned by 90 degrees and X-directional positioning is also attained in the same way. Namely, coarse detecting illumination 28 is used and while wafer 1 is being moved, position detection circuit 102 detects street 3 coarsely; and switching to fine-detecting illumination 29 is made and on the basis of the previously-obtained coarse-detection value and image signal 90 obtained at this time, position detection circuit 102 displays the fine position of street 3. Then, motor control circuit 103 moves table 14 correspondingly to position wafer 1.
COPYRIGHT: (C)1979,JPO&Japio
JP4211578A 1977-11-28 1978-04-12 Detector for street position on semiconductor wafer Granted JPS54134982A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4211578A JPS54134982A (en) 1978-04-12 1978-04-12 Detector for street position on semiconductor wafer
US05/964,353 US4213117A (en) 1977-11-28 1978-11-28 Method and apparatus for detecting positions of chips on a semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4211578A JPS54134982A (en) 1978-04-12 1978-04-12 Detector for street position on semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS54134982A true JPS54134982A (en) 1979-10-19
JPS6152979B2 JPS6152979B2 (en) 1986-11-15

Family

ID=12626944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4211578A Granted JPS54134982A (en) 1977-11-28 1978-04-12 Detector for street position on semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS54134982A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788414A (en) * 1980-11-21 1982-06-02 Seiko Epson Corp Alignment device
JP2012250338A (en) * 2011-06-07 2012-12-20 Disco Corp Machining device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788414A (en) * 1980-11-21 1982-06-02 Seiko Epson Corp Alignment device
JP2012250338A (en) * 2011-06-07 2012-12-20 Disco Corp Machining device

Also Published As

Publication number Publication date
JPS6152979B2 (en) 1986-11-15

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