JPS52143770A - Mask aligning method - Google Patents

Mask aligning method

Info

Publication number
JPS52143770A
JPS52143770A JP6001476A JP6001476A JPS52143770A JP S52143770 A JPS52143770 A JP S52143770A JP 6001476 A JP6001476 A JP 6001476A JP 6001476 A JP6001476 A JP 6001476A JP S52143770 A JPS52143770 A JP S52143770A
Authority
JP
Japan
Prior art keywords
mask
aligning method
mask aligning
alignment patterns
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6001476A
Other languages
Japanese (ja)
Inventor
Hideo Sunami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6001476A priority Critical patent/JPS52143770A/en
Publication of JPS52143770A publication Critical patent/JPS52143770A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform highly accurate mask aligning by coinciding second mask alignment patterns which are rotated at a given angle with respect to the mask alignment patterns on an IC circuit, to said mask alignment patterns on the IC circuit and magnifying the deviation in alignment to make its detection easy.
COPYRIGHT: (C)1977,JPO&Japio
JP6001476A 1976-05-26 1976-05-26 Mask aligning method Pending JPS52143770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6001476A JPS52143770A (en) 1976-05-26 1976-05-26 Mask aligning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6001476A JPS52143770A (en) 1976-05-26 1976-05-26 Mask aligning method

Publications (1)

Publication Number Publication Date
JPS52143770A true JPS52143770A (en) 1977-11-30

Family

ID=13129778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6001476A Pending JPS52143770A (en) 1976-05-26 1976-05-26 Mask aligning method

Country Status (1)

Country Link
JP (1) JPS52143770A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57169239A (en) * 1981-04-09 1982-10-18 Nec Corp Semiconductor device
JPS57176720A (en) * 1981-04-22 1982-10-30 Nec Corp Semiconductor device
JPS57192028A (en) * 1981-05-20 1982-11-26 Matsushita Electric Ind Co Ltd Mask set and positioning method for mask

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57169239A (en) * 1981-04-09 1982-10-18 Nec Corp Semiconductor device
JPS6216535B2 (en) * 1981-04-09 1987-04-13 Nippon Electric Co
JPS57176720A (en) * 1981-04-22 1982-10-30 Nec Corp Semiconductor device
JPS57192028A (en) * 1981-05-20 1982-11-26 Matsushita Electric Ind Co Ltd Mask set and positioning method for mask

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