JPS52117553A - Circular mask - Google Patents
Circular maskInfo
- Publication number
- JPS52117553A JPS52117553A JP3418276A JP3418276A JPS52117553A JP S52117553 A JPS52117553 A JP S52117553A JP 3418276 A JP3418276 A JP 3418276A JP 3418276 A JP3418276 A JP 3418276A JP S52117553 A JPS52117553 A JP S52117553A
- Authority
- JP
- Japan
- Prior art keywords
- circular mask
- round
- mask
- circular
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To secure lens polishing method by forming the photo mask in to a round round shape, and thus to obtain flatness of under 1μm.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3418276A JPS52117553A (en) | 1976-03-30 | 1976-03-30 | Circular mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3418276A JPS52117553A (en) | 1976-03-30 | 1976-03-30 | Circular mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117553A true JPS52117553A (en) | 1977-10-03 |
Family
ID=12407048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3418276A Pending JPS52117553A (en) | 1976-03-30 | 1976-03-30 | Circular mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117553A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62179748U (en) * | 1987-04-23 | 1987-11-14 | ||
JP2013120791A (en) * | 2011-12-06 | 2013-06-17 | National Institute Of Advanced Industrial & Technology | Exposure system |
-
1976
- 1976-03-30 JP JP3418276A patent/JPS52117553A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62179748U (en) * | 1987-04-23 | 1987-11-14 | ||
JPS638900Y2 (en) * | 1987-04-23 | 1988-03-16 | ||
JP2013120791A (en) * | 2011-12-06 | 2013-06-17 | National Institute Of Advanced Industrial & Technology | Exposure system |
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