JPS52117553A - Circular mask - Google Patents

Circular mask

Info

Publication number
JPS52117553A
JPS52117553A JP3418276A JP3418276A JPS52117553A JP S52117553 A JPS52117553 A JP S52117553A JP 3418276 A JP3418276 A JP 3418276A JP 3418276 A JP3418276 A JP 3418276A JP S52117553 A JPS52117553 A JP S52117553A
Authority
JP
Japan
Prior art keywords
circular mask
round
mask
circular
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3418276A
Other languages
Japanese (ja)
Inventor
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3418276A priority Critical patent/JPS52117553A/en
Publication of JPS52117553A publication Critical patent/JPS52117553A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To secure lens polishing method by forming the photo mask in to a round round shape, and thus to obtain flatness of under 1μm.
COPYRIGHT: (C)1977,JPO&Japio
JP3418276A 1976-03-30 1976-03-30 Circular mask Pending JPS52117553A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3418276A JPS52117553A (en) 1976-03-30 1976-03-30 Circular mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3418276A JPS52117553A (en) 1976-03-30 1976-03-30 Circular mask

Publications (1)

Publication Number Publication Date
JPS52117553A true JPS52117553A (en) 1977-10-03

Family

ID=12407048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3418276A Pending JPS52117553A (en) 1976-03-30 1976-03-30 Circular mask

Country Status (1)

Country Link
JP (1) JPS52117553A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62179748U (en) * 1987-04-23 1987-11-14
JP2013120791A (en) * 2011-12-06 2013-06-17 National Institute Of Advanced Industrial & Technology Exposure system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62179748U (en) * 1987-04-23 1987-11-14
JPS638900Y2 (en) * 1987-04-23 1988-03-16
JP2013120791A (en) * 2011-12-06 2013-06-17 National Institute Of Advanced Industrial & Technology Exposure system

Similar Documents

Publication Publication Date Title
JPS5378838A (en) Wide-angle lens of symmetrical type
JPS5394770A (en) Photo mask
JPS52117553A (en) Circular mask
JPS52136644A (en) Lens for spectacles
JPS5364489A (en) Photo semiconductor device
JPS51126073A (en) Pattern printing equpment made available by photo-etching method
JPS51111073A (en) Fine pattern forming
JPS51111075A (en) Photo etching photo mask
JPS5339146A (en) Lens system
JPS5375768A (en) Size check pattern
JPS525270A (en) Photo-mask
JPS52127327A (en) Foucsing lens system
JPS5382173A (en) Positioning method
JPS52153669A (en) Photo mask of semiconductor integrated circuit
JPS5223283A (en) Semiconductor light receiving device
JPS5226497A (en) Resistor or resistor network manufacturing process
JPS5346222A (en) Solid state pick up unit
JPS5241531A (en) Finder for single lens relex camera
JPS52127328A (en) Focusing lens system
JPS547941A (en) Production of optical diffusive plate
JPS539117A (en) Micro-fiche holder
JPS52117072A (en) Hard mask
JPS52152171A (en) Wafer alignment method
JPS51144642A (en) Photo-divider
JPS51115819A (en) Slide manufacturing method