JPS5542230A - Vapor phase growing device - Google Patents
Vapor phase growing deviceInfo
- Publication number
- JPS5542230A JPS5542230A JP11394978A JP11394978A JPS5542230A JP S5542230 A JPS5542230 A JP S5542230A JP 11394978 A JP11394978 A JP 11394978A JP 11394978 A JP11394978 A JP 11394978A JP S5542230 A JPS5542230 A JP S5542230A
- Authority
- JP
- Japan
- Prior art keywords
- stands
- vapor phase
- treated
- phase growing
- stages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To enable many wafers to be treated in a bell jar type vapor phase growing device by setting a plurality of semiconductor substrate heating stands in stages in the device.
CONSTITUTION: The bell jar type vapor phase growing device mainly consists of quartz bell jar 1, substrate heaing stands 7, 7', and quartz nozzle 3. A reactive gas is fed like arrow 2 and flows from nozzle 3 like arrows 4, 4' and 5, 5' at the upper and lower stages, respectively. Substrates 6, 6' are heated with stands 7, 7' which are heated with heaters 10, 11 in upper stage heating stand holder 8 and lower stage heating stand holder 9. Holders 8, 9 are unified and rotatable. With this constitution many wafers can be treated, and many films of high uniformity can be grown. Three or more stages of heating stands enable much more wafers to be treated.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11394978A JPS5542230A (en) | 1978-09-14 | 1978-09-14 | Vapor phase growing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11394978A JPS5542230A (en) | 1978-09-14 | 1978-09-14 | Vapor phase growing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5542230A true JPS5542230A (en) | 1980-03-25 |
Family
ID=14625236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11394978A Pending JPS5542230A (en) | 1978-09-14 | 1978-09-14 | Vapor phase growing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5542230A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5318236A (en) * | 1976-08-02 | 1978-02-20 | Nippon Aluminium Mfg | Metallic sliding window |
JPS54157444U (en) * | 1978-04-25 | 1979-11-01 | ||
JPS60146336U (en) * | 1984-03-09 | 1985-09-28 | 関西日本電気株式会社 | Semiconductor device manufacturing equipment |
-
1978
- 1978-09-14 JP JP11394978A patent/JPS5542230A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5318236A (en) * | 1976-08-02 | 1978-02-20 | Nippon Aluminium Mfg | Metallic sliding window |
JPS5729632B2 (en) * | 1976-08-02 | 1982-06-23 | ||
JPS54157444U (en) * | 1978-04-25 | 1979-11-01 | ||
JPS60146336U (en) * | 1984-03-09 | 1985-09-28 | 関西日本電気株式会社 | Semiconductor device manufacturing equipment |
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